Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision |
| |
| Authors: | Shu-Chun Chu Jyh-Long Chern |
| |
| Affiliation: | a Department of Physics, National Cheng Kung University, No.1, University Road, Tainan City 701, Taiwan
b Department of Photonics, Institute of Electro-Optical Engineering, Microelectronics and Information System Research Center, National Chiao Tung University, Hsinchu 300, Taiwan |
| |
| Abstract: | It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered. |
| |
| Keywords: | 42.25.Fx 07.60.Ly 42.30.Kq |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
