Effect of anomalous transmittance in EUV multilayer optics |
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Authors: | Igor Kozhevnikov Sergiy Yulin Norbert Kaiser |
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Institution: | a Institute of Crystallography, Russian Academy of Sciences, Leninsky Prospect 59, Moscow 119333, Russia b Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein Strasse 7, Jena 07745, Germany |
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Abstract: | In this paper the effect of anomalous transmittance in the EUV spectral region is considered theoretically. The effect consists in a resonant enhancement of the transmittance of a periodic multilayer structure compared with that of a uniform film. The physical reason of the effect lies in the fact that the minima of the wave field intensity of a certain wavelength are placed just in the center of thin absorbing layers resulting in a resonant decrease of wave absorption. The condition of this appearance is analyzed: it is necessary the absorption coefficient (imaginary part of the dielectric constant) of two materials composing a multilayer structure to differ by a factor of 10, at least. A possibility of the use of a multilayer filter in metrology of broadband EUV sources is discussed. |
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