Discrimination of surface and bulk scattering of arbitrary level based on angle-resolved ellipsometry: Theoretical analysis |
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Authors: | Laurent Arnaud Gaëlle Georges Carole Deumié Claude Amra |
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Institution: | Institut Fresnel UMR CNRS 6133, Ecole Centrale de Marseille - Université Paul Cézanne - Université de Provence, Domaine Universitaire de Saint Jérome, 13397 Marseille Cedex 20, France |
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Abstract: | An experimental procedure, which was found to be valid for both low-level and high-level scattering of random media, was recently shown to directly discriminate between surface and bulk scattering origin O. Gilbert, C. Deumie, C. Amra, Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulk materials, Opt. Express 13 (2005) 2403]. The method is based on the ellipsometric measurement of the scattered field over the scattering angle and the analysis of the obtained relative phase shift between s and p polarizations. In the case of low-level scattering, the results were already known and have been explained by first order electromagnetic theories. However, information detailing high-level scattering is scarce. Using rigorous electromagnetic theory, we examined high-level scattering. The differential method enabled us to validate the experimental observations of Gilbert et al. (2005) and explore the limits of validity of the discrimination technique. |
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Keywords: | Light scattering Rigorous scattering model Rough surfaces Optical characterization |
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