a Institute of Spectroscopy, Russian Academy of Science, 142190 Troitsk, Moscow Region, Russia b Physics Instrumentation Center, General Physics Institute, Russian Academy of Science, 142190 Troitsk, Moscow Region, Russia
Abstract:
It is shown that ArF laser beam may act as effective driller producing in fuzed quartz micron radius channel up to 1 cm long while diameter of light spot is few millimeters. Drill formation is accompanied by compaction effect in the drill walls therefore material is not thrown out the channel.