脉冲磁控溅射MoS2-Ti涂层常温及高温真空摩擦磨损性能

利用脉冲磁控溅射法，以铝青铜合金(C63200)和硅片为基底，制作不同Ti含量的MoS₂-Ti复合涂层。通过XRD、SEM、EDS、光学显微镜、多环境摩擦试验机等表征了涂层的结构成分和摩擦性能。结果表明：随Ti含量的增加，涂层致密度提升，S、Mo原子比上升。Ti的掺入使涂层由高度结晶态向非晶态转变。Ti含量增加，涂层摩擦磨损性能先上升再下降，常温真空下含3%Ti的涂层拥有稳定和低至0.015的摩擦系数，23%Ti的涂层失去润滑性。温度升高到400℃，涂层摩擦系数由0.015~0.04上升至0.07~0.1，含13%Ti的涂层高温真空下在800s后润滑失效。磨痕形貌显示，含3%Ti的涂层磨痕最窄，温度升高宽度增加不大，含13%Ti的涂层磨损严重，400℃真空环境下很快磨穿，纯MoS₂和13%Ti涂层摩擦时发现大量磨粒和破碎磨屑。

Tribological property of pulsed magnetron sputtering MoS2-Ti coating at room and elevated temperatures in vacuum

MoS₂-Ti composite coatings were deposited by pulsed magnetron sputtering system on silicon wafers and aluminium bronze (C63200) substrates. Ti content was controlled by different current applied on Ti target. Morphology, composition, tribological properties and structure were respectively investigated by SEM, EDS, ball on disk tribometer and XRD. Results show that with increasing of Ti from 0% to 23%, the compactness of coatings increased gradually and structure were changed from high crystallinity of dominant orientation on basal panels (002) to amorphous forms. Friction and wear test showed that with increasing of Ti fraction, tribological properties were improved firstly and then degraded, 3%Ti coating has friction coefficient as low as 0.015 at room temperature in vacuum, while 23%Ti coating showed no lubrication. As elevated temperature to 400°C, higher friction coefficient and wider wear scar were brought about, even friction coefficient were increased from 0.015~0.04 to 0.07~0.1, 13%Ti coating damaged after 800s at 400°C in wear test. Wear debris and particles were observed on the friction pairs of pure MoS₂ and 13%Ti coating at 400°C.