Abstract: | A method of computer simulated X-ray diffraction patterns has been applied to TiN coatings assuming different gradients of lattice parameters, microstrain or grain size in the direction normal to the substrate surface. The generated diffraction patterns have been compared with experimental ones and a possibility of real occurrence of such gradients is discussed. This method is superior to the methods based on intensity weighted average quantities which do not take into account actual profiles of diffraction peaks. |