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Lateral growth rates in laser CVD of microstructures |
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| Authors: | F. Petzoldt K. Piglmayer W. Kräuter D. Bäuerle |
| Affiliation: | (1) Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, Austria;(2) Present address: Institut für Angewandte Materialforschung-IFAM, Lesumer Heerstrasse 36, D-2820 Bremen-Lesum, Fed. Rep. Germany;(3) Present address: Austria Mikro-Systeme Int.-AMI, A-8141 Unterpremstätten, Austria |
| Abstract: | Lateral growth rates of Ni spots deposited on absorbing substrates by decomposition of Ni(CO)4 with visible Kr+ laser light have been measured. The experimental data are consistent with the calculated temperature distributions. The mechanism of decomposition is thermal with an apparent chemical activation energy of 22±3 kcal/mole for the temperature range 350 K T500 K. |
| Keywords: | 42.60– v 81.15.Gh 61.55.Fe |
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