Energy filter composed of cylindrical and planar electrodes with the rectilinear trajectory of a charged particle beam at the entrance to and the exit from the system

In order to improve the resolution of an energy filter composed of cylindrical and planar electrodes with grounded diaphragms at the end faces, its operating mode in which a charged particle beam crosses the longitudinal axis of the filter twice is studied theoretically. The geometry and blending capacity of the filter that maximize its energy resolution are found. The parameters of the filter under study are compared with those of a similar energy filter in which the beam crosses the longitudinal axis once.