Simulation and Experimental Study of Wavefront Measurement Accuracy of the Pencil-Beam Method |
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| Authors: | Takumi Goto Satoshi Matsuyama Hiroki Nakamori Yasuhisa Sano Yoshiki Kohmura Makina Yabashi |
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| Affiliation: | 1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan;2. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan;3. JTEC Corporation, Osaka, Japan;4. RIKEN SPring-8 Center, Hyogo, Japan |
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| Abstract: | Ultra-bright and high-coherence X-rays are now being used in synchrotron radiation facilities and X-ray free electron laser facilities. X-ray focusing techniques are essential to take full advantage of these excellent X-ray light sources. To meet the strong demand, high-quality X-ray focusing optics have been developed owing to the advancement of ultraprecision machining and measurement. State-of-the-art refractive lenses [1 C.G. Schroer, Applied Physics Letters 87, 124103 (2005).[Crossref], [Web of Science ®] , [Google Scholar]], zone plates [2 T. Chen, Optics Express 19, 19919 (2011).[Crossref], [PubMed], [Web of Science ®] , [Google Scholar]], and Laue lenses [3 H. Yan, Optics Express 19, 15069 (2011).[Crossref], [PubMed], [Web of Science ®] , [Google Scholar]] can be used to achieve X-ray focusing to a spot a few tens of nanometers. |
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