沉积在液体衬底上连续铝薄膜的微观结构

研究了沉积在硅油衬底表面的连续铝薄膜的微结构及其表面形貌.与沉积在单晶硅表面的铝薄膜相比，两种铝薄膜均属颗粒结构，但硅油表面的铝薄膜具有颗粒尺寸较小、大小不均匀，表面起伏较大等特点，而且在该铝薄膜边缘的下表面，有一明显的波纹状楔型结构，其斜率仅为10^-4—10^-5.实验结果表明：这一现象是由于液体衬底的热膨胀行为引起的.此外对样品的晶态也进行了研究. 关键词： 铝薄膜 液体衬底 微观结构

SURFACE MORPHOLOGY AND GROWTH MECHANISM OF THE Al FILMS DEPOSITED ON LIQUID SURFACES

An aluminum film system,deposited on the silicone oil drop surfaces by vapor deposition method,has been fabricated and its surface morphologies as well as growth mechanism have been investigated by means of scanning electron microscopy.The granular size of Al film on oil surface is smaller than that of Al film on the silicon substrate.It is observed that the granular size distribution is inhomogeneous and the surface fluctuation is moderately large in the film samples.Furthermore,we find that the perpendicular fluctuation of the lower surface is more remarkable than that of the upper surface of the Al film.Near the edge of the silicone oil drop,an anomalous wedge shaped structure with a slope of 10^-4—10^-5 spontaneously forms and its growth mechanism can be interpreted as thethermal expansion of the liquid substrates.