The synthesis and characterization of poly(3,4‐ethylenedioxythiophene) (PEDOT) using water‐assisted vapor phase polymerization (VPP) and oxidative chemical vapor deposition (oCVD) are reported. For the VPP PEDOT, the oxidant, FeCl3, is sublimated onto the substrate from a heated crucible in the reactor chamber and subsequently exposed to 3,4‐ethylenedioxythiophene (EDOT) monomer and water vapor in the same reactor. The oCVD PEDOT was produced by introducing the oxidant, EDOT monomer, and water vapor simultaneously to the reactor. The enhancement of doping and crystallinity is observed in the water‐assisted oCVD thin films. The high doping level observed at UV–vis–NIR spectra for the oCVD PEDOT, suggests that water acts as a solubilizing agent for oxidant and its byproducts. Although the VPP produced PEDOT thin films are fully amorphous, their conductivities are comparable with that of the oCVD produced ones.
