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轻型反射镜研究与发展
引用本文:齐亚范,方敬忠,杨力,吴时彬,熊胜明,张云洞.轻型反射镜研究与发展[J].光学技术,1998(3).
作者姓名:齐亚范  方敬忠  杨力  吴时彬  熊胜明  张云洞
作者单位:中国科学院光电技术研究所
摘    要:应用有限元分析方法研究了自重对轻型反射镜变形的影响,反射镜轻量化技术及关键材料,并研制出Φ630mm轻型熔石英反射镜;高温200℃、低温-40℃及5年时效对面形稳定性影响;轻型熔石英反射镜加工技术;轻型反射镜宽带高反射膜系及镀膜技术。利用上述技术研制出Φ300mm、Φ410mm、Φ470mm及Φ630mm球面及非球面熔石英轻型反射镜及平面反射镜。轻型反射镜减重达70%,Φ630mm轻型非球面反射镜仅重20.2kg。Φ470mm球面轻型反射镜加工后面形PV值0.117λ,RMS值0.024λ(λ∶632.8nm)。

关 键 词:轻型反射镜,熔石英

Investigated and development of lightweight mirror
Qi Yafan,Fang Jingzhong,Yang Li,Wu Shibin,Xiong Shengming,Zhang Yundong.Investigated and development of lightweight mirror[J].Optical Technique,1998(3).
Authors:Qi Yafan  Fang Jingzhong  Yang Li  Wu Shibin  Xiong Shengming  Zhang Yundong
Abstract:Influence of weight of lightweight mirror on surface deformation was studied by finite element analysis method. The lightening technique of mirror and key materials was studied and a Φ 630mm lightweight fused mirror was developed. The effects of high temperature (200℃), low temperature (-40℃) and five year’s ageing on figure stability were investigated. Optical fabrication technique, coating technology and wide high reflective film system of lightweight mirror were also studied.Lightweight spherical and aspherical fused sillica mirror 300mm, 410mm, 470mm and 630mm in diameter and some plane mirrors were manufactured. The weight of lightweight fused sillica mirror was reduced about 70%. Figure of 470mm spherical fused silica lightweight mirror was 0.117λ in P V, 0.024λ in RMS (λ∶632.8nm).
Keywords:lightweight mirror  fused silica  
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