Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator |
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Authors: | Kanda Takefumi Kurosawa Minoru K Higuchi Toshiro |
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Affiliation: | The University of Tokyo, Graduate School of Engineering, Japan. kanda@intellect.pe.u-tokyo.ac.jp |
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Abstract: | In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity. |
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