Athermal annealing of Mg-implanted GaAs |
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Authors: | J Simonson SB Qadri MV Rao R Fischer J Grun MC Ridgway |
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Institution: | (1) George Mason University, Fairfax, VA 22030-4444, USA;(2) US Naval Research Laboratory, Washington, DC 20375, USA;(3) Australian National University, Canberra, 0200, ACT, Australia |
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Abstract: | High-resolution X-ray diffraction scans and electrical resistivity measurements were performed on Mg-implanted GaAs exposed to laser shock annealing on both the implanted and the unimplanted surfaces of the wafer. Measurements on the sample that was subjected to a laser pulse exposure on the implanted side indicate that annealing had occurred within 3 mm of the center of the laser-exposed spot. X-ray scans and the topographs indicate the propagation of a mechanical wave propagating in the radial direction from the laser-exposed spot. No evidence of annealing, however, was observed at any position on the Mg-implanted GaAs sample that was subjected to a laser pulse exposure on the unimplanted side. The Mg implant did not show any redistribution for the laser-shocked annealing, in contrast to the conventional rapid thermal annealing. PACS 61.72.Vv; 62.50.+p; 71.55.Eq; 79.20.Ds; 81.05.Ea |
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