电感耦合等离子体质谱法检测氧化镓中杂质元素

建立了电感耦合等离子体质谱法(ICP-MS)测定氧化镓中杂质元素的检测方法,采用微波消解技术溶样,以5 ng/mL Rh为内标补偿校正镓基体的抑制效应,采用碰撞室技术(CCT)消除多元素分子离子的干扰.方法的检出限为0.10～1.0 ng/mL,加标回收率在85%～110%之间,RSD为0.6%～7.1%.该方法能满足99.95%～99.995%氧化镓中杂质元素的分析要求.

Detection of impurity elements in gallium oxide by inductive coupled plasma-mass spectrometry

In this paper, a new method of detecting impurity elements in gallium oxide by inductively coupled plasma-mass spectrometry (ICP-MS) was developed. The microwave digestion technique was employed to prepare sample solu-tions to reduce pollution and the blank. 5 ng/mL Rh was used to compensate the depression effect, and CCT was ap-plied to eliminating the interference of multi-element molecules and ions. The detection limits of the method were 0.10 to 1.0 ng/mL. The recoveries were in the range of 85%～110%, and RSDs were 0.60%～7.1%. The results showthat this method can meet the analytical requirements of the impurity elements in gallium oxide (99.95%～99.995%).