| An Innovative Gas Sensor with On-Chip Reference Using Monolithic Twin Laser |
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| 作者姓名： | 张永刚 田招兵 张晓钧 顾溢 李爱珍 祝向荣 郑燕兰 刘盛 |
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| 作者单位： | State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 |
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| 基金项目： | Supported in part by the National Basic Research Programme of China under Grant No 2006CB604903 and the Shanghai STC Project under Grant No 06ZR14104. |
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| 摘 要： | An innovative gas sensor with on-chip reference using a monolithic twin laser is proposed. In this sensor a monolithic twin laser generates two closer laser beams with slight different wavelengths alternatively, one photodiode is used to catch both absorption and reference signals by time division multiplexing. The detection of nitrous oxide adopting this scheme using a 2.1μm antimonide laser and an InGaAs photodiode has been demonstrated experimentally with detection limit below 1ppm. Using this on chip reference scheme the fluctuations from the optical path and devices can be compensated effectively; the sensor system is simplified distinctly.
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| 关 键 词： | 气敏元件 芯片 单片电路 对组线 散射 |
| 收稿时间： | 2007-6-26 |
| 修稿时间： | 2007-06-26 |
An Innovative Gas Sensor with On-Chip Reference Using Monolithic Twin Laser |
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| ZHANG Yong-Gang,TIAN Zhao-Bing,ZHANG Xiao-Jun,GU Yi,LI Ai-Zhen,ZHU Xiang-Rong,ZHENG Yan-Lan,LIU Sheng.An Innovative Gas Sensor with On-Chip Reference Using Monolithic Twin Laser[J].Chinese Physics Letters,2007,24(10):2839-2841. |
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| Authors: | ZHANG Yong-Gang TIAN Zhao-Bing ZHANG Xiao-Jun GU Yi LI Ai-Zhen ZHU Xiang-Rong ZHENG Yan-Lan LIU Sheng |
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| Institution: | State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 |
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| Abstract: | An innovative gas sensor with on-chip reference using a monolithic twin laser is proposed. In this sensor a monolithic twin laser generates two closer laser beams with slight different wavelengths alternatively, one photodiode is used to catch both absorption and reference signals by time division multiplexing. The detection of nitrous oxide adopting this scheme using a 2.1 I~m antimonide laser and an InGaAs photodiode has been demonstrated experimentally with detection limit below i ppm. Using this on chip reference scheme the fluctuations from the optical path and devices can be compensated effectively; the sensor system is simplified distinctly. |
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| Keywords: | 42 55 Px 85 60 Dw 52 25 Os |
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