| 准直小孔法自动调焦在激光直写入系统中的应用 |
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| 引用本文： | 赵为党,沈亦兵.准直小孔法自动调焦在激光直写入系统中的应用[J].光子学报,1998,27(8):753-756. |
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| 作者姓名： | 赵为党 沈亦兵 |
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| 作者单位： | 现代光学仪器国家重点实验室浙江大学 |
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| 摘 要： | 本文介绍了一种新的自动调焦方法准直小孔法.对自动调焦的原理和后继电路处理方法作了详细的分析.它具有响应时间短、灵敏度高,能够很好的在激光直接写入系统中克服物镜工作台运动中导轨的不平和轴向窜动所造成的离焦。
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| 关 键 词： | 准直小孔法 自动调焦 激光直写入 |
| 收稿时间： | 1998-03-23 |
AUTO FOCUSING IN LDWS BY USING COLLIMATING EYELET METHOD |
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| Zhao Weidang,Shen Yibing,Liu Yuling,Hou Xiyun,Yang Guoguang State Key Laboratory of Modern Optical Instrument,Hangzhou Received date:--.AUTO FOCUSING IN LDWS BY USING COLLIMATING EYELET METHOD[J].Acta Photonica Sinica,1998,27(8):753-756. |
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| Authors: | Zhao Weidang Shen Yibing Liu Yuling Hou Xiyun Yang Guoguang State Key Laboratory of Modern Optical Instrument Hangzhou Received date:-- |
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| Institution: | Zhao Weidang,Shen Yibing,Liu Yuling,Hou Xiyun,Yang Guoguang State Key Laboratory of Modern Optical Instrument,Hangzhou 310027 Received date:1998-03-23 |
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| Abstract: | A new method on auto focusing by using collimating eyelet is introduced in this paper.The tenet of auto focusing and the procession of circuit are presented in detail,which has the advantage of quick time response and high precision.It can dramatically decrease the error introduced by rugged rail and axial run out during the movement of object lens platform in LDWS. |
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| Keywords: | Collimating eyelet Auto focusing LDWS |
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