Modeling of single- and multimode photonic-crystal planar waveguides with the plane-wave admittance method |
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Authors: | M. Dems K. Panajotov |
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Affiliation: | (1) 21st Century COE SLLS, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan;(2) Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan;(3) PPL Company, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan |
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Abstract: | One-foil targets emit most transition radiation (TR) power in storage ring synchrotrons. Such one-foil TR emitting targets (OFTRTs) are optimized, with respect to the foil material and the foil thickness, for use as X-ray lithography (XRL) sources. The best possible elemental material and the foil thickness of OFTRTs for XRL are determined for our storage ring synchrotrons MIRROIRCLE-20SX and MIRRORCLE-6X, which operate with electrons accelerated to 20 MeV and 6 MeV, respectively. It is shown that the XRL efficiency of a OFTRT, with an optimum thickness, increases when the elemental foil material has a lower atomic number Z. The best elemental OFTRT, for performing XRL by MIRRORCLE-20SX, should contain one Be foil with a thickness of d≅240 nm, while the second best OFTRT should be made of one C foil with d≅220 nm. The best elemental OFTRT, for performing XRL by MIRRORCLE-6X, should contain one C foil with d≅35 nm, while the second best OFTRT should be made of one Be foil with d≅100 nm, because there are no thinner Be foils. The XRL efficiency of a C-foil OFTRT increases when a higher-density foil is used. A OFTRT containing one foil of a given material with optimum thickness, in MIRRORCLE-20SX, has approximately 100 times larger XRL efficiency in comparison with such a target in MIRRORCLE-6X. PACS 41.50.+h; 29.25.-t; 81.16.Nd; 41.60.Ap; 29.20.Dh |
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