Integrated Optic Pressure Sensor Using Intermodal Interference between Two Mutual Orthogonal Guided-Modes

We theoretically and experimentally investigated fundamental characteristics of an integrated optic pressure sensor using intermodal interference between the lowest-order TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide along an edge of the diaphragm. Its operation is based on a difference of phase retardations produced in the two guided modes through the photoelastic effect. The sensor was fabricated by bonding two glass substrates together: a Corning 0211 glass 300 μMm thick to form a waveguide and a thick substrate with a 10 mm × 10 mm square hole to define the diaphragm. The fabricated sensor was successfully tested using a He-Ne laser at 633 nm. The halfwave pressure was measured to be 77 kPa which is almost double the theoretical estimate.