| 静电力平衡式微型硅加速度计方案分析 |
| |
| 引用本文： | 郭秀中,陈家斌. 静电力平衡式微型硅加速度计方案分析[J]. 中国惯性技术学报, 1995, 0(3) |
| |
| 作者姓名： | 郭秀中 陈家斌 |
| |
| 作者单位： | 南京航空航天大学 |
| |
| 摘 要： | 静电力平衡式微型硅加速度计是一种新型加速度计。本文对这种加速度计的３种典型方案进行了分析，导出静电力（力矩）、静电力平衡回路刚度（角刚度）及加速度测量范围的表达式。有关结果可为这种加速度计参数设计提供理论依据。
|
| 关 键 词： | 微型硅加速度计，静电力平衡回路，刚度 |
Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer |
| |
| Guo Xiuzhong, Cheu Jiabin. Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer[J]. Journal of Chinese Inertial Technology, 1995, 0(3) |
| |
| Authors: | Guo Xiuzhong Cheu Jiabin |
| |
| Affiliation: | Nanjing University of Aeronautics and Astronautics |
| |
| Abstract: | Electrostatically force-balanced Micro silicon acceleromter is a new type of accelerometer. Three kinds of typical .schemes of this type of accelerometer are analyzed in this paper. The formulae of electrostatic force(torque), stiffness(angular stiffness ) of electrostatic force balance circuit, measurement range of acceleration are presented. The results presented in this paper can be used as the basis on designing the accelerometer parameters. |
| |
| Keywords: | micro Silicon accelerometer electrostatically force-balance circuit stiffness |
| 本文献已被 CNKI 等数据库收录！ |
