Using electron backscatter diffraction to investigate the influence of mechanical polishing on the state of the surface of diamond期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

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Using electron backscatter diffraction to investigate the influence of mechanical polishing on the state of the surface of diamond

Authors:	Email author" target="_blank">E?V?Korostylev Email author V?S?Bormashov S?A?Tarelkin M?A?Doronin

Institution:	1.Moscow Institute of Physics and Technology,Dolgoprudny, Moscow oblast,Russia;2.Technological Institute for Superhard and Novel Carbon Materials,Troitsk, Moscow,Russia

Abstract:	Electron backscatter diffraction is used to determine the influence of mechanical polishing on the surface state of a two-layer structure made from diamond. It is found that the process of polishing does not lead to significant degradation of the surface, while the thickness of the amorphous layer formed due to polishing does not exceed a few atomic layers.

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