Accurate interband-energy measurements from Ellipsometric spectra |
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Authors: | Jie Lian Qingpu Wang Xingkui Cheng Aijian Wei Ping Li Yurong Wang |
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Affiliation: | a School of Information Science and Engineering, Shandong University, Jinan, Shandong Province 250100, , People's Republic of China;b Institute of Physics and Microelectronics, Shandong University, Jinan, Shandong Province 250100, People's Republic of China |
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Abstract: | The optical constants of AlGaInP, AlGaInP (Si-doping) and AlGaInP (Mg-doping) grown by MOCVD were measured in the region of visible light at room temperature using null spectroscopic ellipsometry, then the dielectric function spectra were obtained. By numerical differentiation, the third-derivative spectra of the dielectric function for three samples were evaluated. Based on the third-derivative theory, it was proved that the third-derivative spectra were proportional to the electroreflectance (ER) spectra under the low-field modulation condition. Thus, the third-derivative spectra given by the ellipsometric spectra were directly related to the band structure of material. Analyzing the third-derivative spectra of the imaginary part of the dielectric function with the three-point method used in ER spectra, the Eg and Eg+Δ0 values of three samples were gained accurately. The experimental results were in good agreement with those published. |
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Keywords: | Ellipsometric spectrum Electroreflectance spectrum Three-point method Interband energy |
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