|
|||||
|
|
Crystallographic Tilt in Aluminum Gallium Nitride Epilayers Grown on Miscut Aluminum Nitride Substrates |
|
| Authors: | Shashwat Rathkanthiwar Milena B Graziano James Tweedie Seiji Mita Ronny Kirste Ramon Collazo Zlatko Sitar |
| Institution: | 1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695-7919 USA;2. Adroit Materials, Inc., 2054 Kildaire Farm Road, Cary, NC, 27518 USA;3. Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695-7919 USA
Adroit Materials, Inc., 2054 Kildaire Farm Road, Cary, NC, 27518 USA |
| Abstract: | |
| Keywords: | AlGaN AlN substrates strain relaxation tilt |