High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains |
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| Authors: | Lan Jiang Pengjun Liu Xueliang Yan Ni Leng Chuancai Xu Hai Xiao Yongfeng Lu |
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| Institution: | NanoManufacturing Fundamental Research Joint Laboratory of National Science Foundation of China, School of Mechanical Engineering, Beijing Institute of Technology, 100081, China. jianglan@bit.edu.cn |
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| Abstract: | This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities. |
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