常压下DBD等离子体聚合氟碳有机膜表征

通过等离子体增强化学沉积方法，在同轴圆柱形DBD反应器中利用一种新单体十四氟己烷常压下聚合获得氟碳颗粒膜；通过扫描电镜（SEM），X光电子能谱膜（XPS）、傅立叶红外光谱（FTIR）表征膜的表面和团簇形态、化学和结构组成随着放电功率的减小，在基片表面形成的颗粒尺寸大且分布均匀性差，所获得膜中F／C和交联度分别为1．54和68．5％，要比低气压下获得的无定形氟碳聚合膜的交联度高出10％左右，氧元素的含量为5．53％，比低气压膜中氧的含量要高出2％～3％。

Deposited Fluorocarbon Particle Films by PECVD at Atmosphere Pressure

Using a new monomer perfluorohexane(C6F14)in coaxial column DBD reactor obtained fluorocarbon particle films by plasma enhanced chemical vapor deposition;Obtaining the characterization of membranous suface,the chemical structure and composition by SEM,XPS and FTIR,the size distribution of particles exhibited worse uniform with increasing discharge power,the F/C and degree of crosslinking are 1.54 and 68.5% respectively,the degree of crosslinking is about 10% more than that of fluorocarbon films obtained at low atmosphere press,the percentage content of oxygen is 5.53%,about 2%~3% more than that of fluorocarbon films obtained at low atmosphere press.