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Thickness distribution of thin amorphous chalcogenide films prepared by pulsed laser deposition |
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| Authors: | Martin Pavli?ta Martin Hrdli?ka Petr Němec Jan P?ikryl Miloslav Frumar |
| Institution: | (1) Research Centre LC523 ‘Advanced Inorganic Materials’, Faculty of Chemical Technology, University of Pardubice, nám. Čs. legií 565, 532 10 Pardubice, Czech Republic;(2) Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, nám. Čs. legií 565, 532 10 Pardubice, Czech Republic |
| Abstract: | Amorphous chalcogenide thin films were prepared from As2Se3, As3Se2 and InSe bulk glasses by pulsed laser deposition using a KrF excimer laser. Thickness profiles of the films were determined using variable angle spectroscopic ellipsometry. The influence of the laser beam scanning process during the deposition on the thickness distribution of the prepared thin films was evaluated and the corresponding equations suggested. The results were compared with experimental data. |
| Keywords: | PACS" target="_blank">PACS 81 15 Fg 81 05 Kf |
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