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Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition |
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| Authors: | Baraban A. P. Dmitriev V. A. Drozd V. E. Petrov Yu. V. Prokof’ev V. A. |
| Affiliation: | 1.St. Petersburg State University, 199034, St. Petersburg, Russia ; |
| Abstract: | Optics and Spectroscopy - The possibility of using electroluminescence to study Si–Ta2O5 and Si–SiO2–Ta2O5 structures and obtain information on the electronic structure of the... |
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