| Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses |
| |
| 作者姓名： | 安然 李焱 窦艳萍 方瀛 杨宏 龚旗煌 |
| |
| 作者单位： | StateKeyLaboratoryforMesoscopicPhysicsandDepartmentofPhysics,PekingUniversity,Beijing100871 |
| |
| 摘 要： | Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated.
|
| 关 键 词： | 激光显微机械加工 碳酸石灰玻璃 不规则微洞 热离散 |
Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses |
| |
| AN Ran,LI Yan,DOU Yan-Ping,FANG Ying,YANG Hong,GONG Qi-Huang.Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses[J].Chinese Physics Letters,2004,21(12):2465-2469. |
| |
| Authors: | AN Ran LI Yan DOU Yan-Ping FANG Ying YANG Hong GONG Qi-Huang |
| |
| Institution: | State Key Laboratory for Mesoscopic Physics and Department of Physics, Peking University, Beijing 100871 |
| |
| Abstract: | Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated. |
| |
| Keywords: | 52 38 Mf 61 80 Ba 42 65 Re |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理快报》浏览原始摘要信息 |
| 点击此处可从《中国物理快报》下载免费的PDF全文 |
