Diffraction grating with rectangular grooves exceeding 80% diffraction efficiency |
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| Institution: | 1. Physikalisches Institut der Universität Erlangen-Nürnberg, Staudtstrasse 7, D-91058 Erlangen, Germany;2. Lehrstuhl Fertigungstechnologie der Universität Erlangen-Nürnberg, Egerlandstraße 11, D-91058 Erlangen, Germany;3. Lehrstuhl für Hochfrequenztechnik, Cauerstraße 9, D-91058 Erlangen, Germany;1. Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai, 200433, China;2. Department of Physics, Faculty of Science, Ningbo University, Ningbo, 315211, China;3. Department of Optical Science and Engineering, Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Fudan University, Shanghai, 200433, China;4. Department of Electrical and Computer Engineering, University of California, San Diego, CA 92093, USA;1. Centre for Industrial and Engineering Optics/School of Physics, Clinical and Optometric Sciences, College of Sciences and Health, Dublin Institute of Technology, Kevin Street, Dublin 8, Ireland;2. Laboratoire Catalyse & Spectrochimie, ENSICAEN, Université de Caen Basse-Normandie, CNRS, 6, Boulevard du Maréchal Juin, 14050 Caen Cedex, France;3. School of Chemical and Pharmaceutical Sciences, College of Sciences and Health, Dublin Institute of Technology, Kevin Street, Dublin 8, Ireland |
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| Abstract: | A novel design for a surface relief grating with rectangular grooves is presented. The first reflected diffraction order shows experimentally 84% diffraction efficiency for a metallic grating. The required binary surface relief can be manufactured by using one single microlithographic fabrication step similar to standard processes in microelectronics. Each period of the grating consists of a subwavelength “minilattice” with a variable duty cycle. A theoretical model of the structure is presented and compared to measurements at 10.6 μm wavelength. Applications ranging from deflectors, polarizing beam splitters, variable attenuators to general diffractive components such as kinoforms for laser beam shaping are proposed. |
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