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| 掺杂不同钛含量氮化锆薄膜的制备 | |
| 引用本文： | 姚舜晖,苏演良,高文显,郑凯文.掺杂不同钛含量氮化锆薄膜的制备[J].摩擦学学报,2006,26(5):413-416. |
| 作者姓名： | 姚舜晖 苏演良 高文显 郑凯文 |
| 作者单位： | 1. 长荣大学,会计信息系,台湾,台南,归仁,711 2. 成功大学,机械工程系,台湾,台南,701 3. 建国科技大学,机电光系统研究所,台湾,彰化,500 |
| 基金项目： | 台湾省科学委员会资助项目（NSC-92-2212-E-006-127）. |
| 摘 要： | 采用非平衡磁控溅射技术制备含不同钛含量的氮化锆（Zr-Ti—N）复合薄膜材料，并研究薄膜基本特性及其摩擦磨损性能．结果表明：随着Ti含量增加，Zr—Ti—N薄膜硬度有所提高；在Ti含量为18．7at．％时，薄膜的硬度达到最大值2483HK0.025；当添加16．5at．％Ti时，硬度值略有降低，但临界载荷最高，耐磨性最佳． |
| 关 键 词： | 复合材料 Zr—Ti—N薄膜 摩擦磨损性能 |
| 文章编号： | 1004-0595（2006）05-0413-04 |
| 收稿时间： | 2005-08-25 |
| 修稿时间： | 2006-05-29 |
Tribological Performance of ZrN Ceramic Thin Films with Ti Additions |
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| YAO Sun-hui,SU Yan-liang,GAO Wen-xian,CHENG Kai-wen.Tribological Performance of ZrN Ceramic Thin Films with Ti Additions[J].Tribology,2006,26(5):413-416. | |
| Authors: | YAO Sun-hui SU Yan-liang GAO Wen-xian CHENG Kai-wen |
| Abstract: | Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at. % Ti. However, the film with addition of 16.5 at. % Ti showed the best wear performance and the highest critical loads. |
| Keywords: | composite materials Zr-Ti-N thin film friction-wear performance |
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