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| 微机械圆盘谐振器的仿真分析及等效电路 | |
| 引用本文： | 贾英茜,徐淑壹,赵正平.微机械圆盘谐振器的仿真分析及等效电路[J].微纳电子技术,2011,48(4):248-253. |
| 作者姓名： | 贾英茜 徐淑壹 赵正平 |
| 作者单位： | 1. 河北工业大学信息工程学院,天津,300130;中国电子科技集团公司第十三研究所,石家庄,050051 2. 中国电子科技集团公司第十三研究所,石家庄,050051 3. 河北工业大学信息工程学院,天津,300130;中国电子科技集团公司,北京,100846 |
| 摘 要： | 通过对径向振动圆盘的机械振动方程进行分析,将机械振动的分散参数集总化,提取出机械集总参量并通过机电类比的方法将集总化的机械参量类比成电参量,建立起径向振动微机械谐振器的电参数模型。利用ANSYS软件对径向振动盘式微机械谐振器进行模拟,提取出谐振频率和振动位移,并以此为基础计算出等效质量及阻尼和刚度的数值,进而通过机电耦合系数求出电参数值。以所提取的电参数为依据,分析了谐振器的结构对谐振器的等效阻抗的影响。谐振器的等效电路及分析结果将成为后续结构和驱动电路设计的出发点。 |
| 关 键 词： | 微机械系统(MEMS) 微机械谐振器 机电类比 机械集总参数 ANSYS软件 |
Simulation Analysis and Equivalent Circuit of the MEMS Disk Resonator |
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| Jia Yingqian,Xu Shuyi,Zhao Zhengping.Simulation Analysis and Equivalent Circuit of the MEMS Disk Resonator[J].Micronanoelectronic Technology,2011,48(4):248-253. | |
| Authors: | Jia Yingqian Xu Shuyi Zhao Zhengping |
| Institution: | Jia Yingqian1,2,Xu Shuyi2,Zhao Zhengping1,3 (1.School of Information Engineering,Hebei University of Technology,Tianjin 300130,China,2.The 13th Research Institute,CETC,Shijiazhuang 050051,3.China Electronics Technology Group Corporation,Beijing 100846,China) |
| Abstract: | The distributed parameters of the mechanical vibration were lumped and the lumped parameters were extracted by the analysis of the mechanical vibration equation for the radial vibration disk.Then the lumped mechanical parameters were converted to electric parameters by the electromechanical analogy method,and the electric parameters model of the radial vibration mechanical resonator was established.The mechanical radial vibration disk resonator was simulated with the ANSYS software,and the resonant frequenc... |
| Keywords: | micro-electromechanical system(MEMS) MEMS resonator mechanical-electrical analogy mechanical lumped parameter ANSYS software |
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