Structural characterization of thin films formed or changed on materials by micro Raman spectroscopy |
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| Authors: | K. Witke Klaus-Werner Brzezinka Peter Reich |
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| Affiliation: | Bundesanstalt für Materialforschung und -prüfung (BAM), Rudower Chaussee 5, D-12489 Berlin, Germany, DE
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| Abstract: | Micro Raman spectroscopy is shown as a useful method of high spatial resolution in characterization of thin films on or in materials formed or changed as a result of external influences. Identification of black films in the glaze of porcelain, of impairing deposits on components of an ICP mass spectrometer and of tribologically stressed contacts of ADLC films or (Ti,Mo)(C,N) ceramics, respectively, are examples for application. |
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