| 硅键合SOI平面光波导探索 |
| |
| 引用本文： | 李金华,林成鲁.硅键合SOI平面光波导探索[J].光学学报,1994,14(2):69-172. |
| |
| 作者姓名： | 李金华 林成鲁 |
| |
| 作者单位： | 江苏石油化工学院物理教研室，中国科学院上海冶金研究所离子束开放实验室 |
| |
| 基金项目： | 传感技术国家实验室资助 |
| |
| 摘 要： | 本文分析了ＳＩＭＯＸ／ＳＯＩ和ＤＷＢ／ＳＯＩ结构的性能特点。尝试用ＤＷＢ／ＳＯＩ材料制备不同波导层厚度的平面光波导样品，并测试了１．１５μｍ和１．５２３μｍ激光的ＴＥ和ＴＭ模的传输损耗。１．５２３μｍ光的ＴＥ模的最小传输损耗已达０．２７ｄＢ／ｃｍ。说明ＤＷＢ／ＳＯＩ材料是一种有潜力的光波导材料。
|
| 关 键 词： | 光波导 SOI材料 硅 键合工艺 |
| 收稿时间： | 1993/3/1 |
Investigation of Planar Optical Wavequides with DWB/SOI Structure |
| |
| Li Jinhua, Lin Chenglu, G. T. Reed.Investigation of Planar Optical Wavequides with DWB/SOI Structure[J].Acta Optica Sinica,1994,14(2):69-172. |
| |
| Authors: | Li Jinhua Lin Chenglu G T Reed |
| |
| Abstract: | The structure characteristics of SIMOX/SOI (Separation by implanted oxygen/silicon on insulator) and DWB (direct wafer bonding)/SOI are discussed. Some planar optical waveguides samples with different thickness of layer were fabricated in DWB/SOI structure. The propagstion losses were measured for both TE and TM modes at wavelenths of 1.15 μm and 1.523 μm. The lowest loss is close to the intrinsic aborption of pure crystal silicon. It indicated that the DWB/SOI structure is a Potential material for optical waveguides. |
| |
| Keywords: | optical waveguides direct wafer bonding silicon on insulator |
| 本文献已被 CNKI 维普 等数据库收录！ |
