新国家标准《公差原则》与其旧标准的对比

分别对 新国家标准《公差原则》和《形状和位置公差最大实体要求、最小实体要求和可逆要求》与其相应的ISO 标准和旧国标进行了对比研究,找出了它们之间的不同点。     

有向功能关系图OFRG功能的代数实现算法及图意义

研究了计算机辅助建立产品（零部件）链路方程问题,提出０－１矩阵、矩阵广义伴随等概念,给出矩阵留位乘法,乘方法两种寻找链路的方法。所得链路方程是产品拓扑与几何信息的有机结合体,便于计算机辅助建立功能方程。     

公差原则应用实例分析

公差原则是进行精度设计时处理尺寸公差与形位公差关系的指导原则。本文作者着重阐述3个公差原则的区别,分析典型实例,明确说明三种公差原则的应用场合,并指出合理地选用公差原则对提高机械产品质量、降低生产成本的作用。     

On the optimal design centering,tolerancing, and tuning problem

In this note, we point out an erroneous result appearing in the literature on the optimal design centering, tolerancing, and tuning problem. Using the same framework of outer approximations, we then suggest alternate approaches to the solution of this problem, including a special-purpose subalgorithm.This research was supported by the National Science Foundation, Grant No. ECS-82-04452. The author wishes to thank Dr. E. Polak for his helpful comments.     

Aberration Functions for Microlithographic Optics

In this paper a newly proposed polynomial series for aberration expression is reviewed. The new series can be utilized to express aberration distribution of a high NA and wide field optical system like a microlithographic projection lens. Moreover, the new aberration functions can be used for the microlithographic lens manufacturing process because they can express each aberration component of a rotationally symmetric system with a small amount of decentering error and astigmatic (toric) error.     

投影光刻物镜倍率的公差分析与补偿

为满足严格的套刻需求,双远心结构的投影光刻物镜需要选择恰当的元件移动来进行倍率的补偿和调节。提出了一种简单而实用的方法来进行倍率的公差分析。该方法利用商业优化设计软件和有限差分算法计算了多项公差对物镜倍率的敏感程度,同时结合公差对系统波像差的敏感度选择最佳的倍率补偿元件。利用以上方法,对一台双远心、工作波长193nm以及数值孔径0.75的投影光刻物镜进行了倍率的公差分析和补偿器优选。结果显示,系统较好地实现了±50×10-6的倍率调节功能,而系统波像差劣化程度均方根值小于1.5nm。     

An implementable algorithm for the optimal design centering,tolerancing, and tuning problem

An implementable master algorithm for solving optimal design centering, tolerancing, and tuning problems is presented. This master algorithm decomposes the original nondifferentiable optimization problem into a sequence of ordinary nonlinear programming problems. The master algorithm generates sequences with accumulation points that are feasible and satisfy a new optimality condition, which is shown to be stronger than the one previously used for these problems.This research was sponsored by the National Science Foundation (RANN), Grant No. ENV-76-04264, and by the Joint Services Electronic Program, Contract No. F44620-76-C-0100.     

Elements of Cost-Based Tolerancing

One goal for optical design is to assign tolerances so that the as-built systems satisfy all required specifications and have the lowest fabrication and assembly expense. Tolerances affect not only the image quality, but also the production cost. Thus tolerance assignment is a critical step in the optical design process. In this paper we discuss the essential elements of a cost-based tolerancing method. The paper concludes with an example comparing results from a cost-based tolerancing procedure with results from a conventional approach.This paper was originally presented at the 2nd International Conference on Optical Design and Fabrication, ODF2000 which was held on November 15-17, 2000 at the International Conference Center, Tokyo, Waseda University, Japan.     

公差设计中敏度系数的张量求法

把张量相关概念引入计算机辅助公差设计的研究中,导出显含约束,具有普遍意义的敏度系数求取方法。结果在任何坐标系下具有不变形式;概念清晰,便于计算机实现。