介质靶表面的充电效应对等离子体浸没离子注入过程中鞘层特性的影响

针对等离子体浸没离子注入技术在绝缘体表面制备硅薄膜工艺，采用一维脉冲鞘层模型描述介质靶表面的充电效应对鞘层厚度、注入剂量及靶表面电位等物理量的影响.数值模拟结果表明：随着等离子体密度的增高，表面的充电效应将导致鞘层厚度变薄、表面电位下降以及注入剂量增加，而介质的厚度对鞘层特性的影响则相对较小. 关键词： 等离子体浸没离子注入 脉冲鞘层 绝缘介质 充电效应     

6种竹子叶器官的解剖结构比较

【目的】探究竹子营养叶与秆箨之间的关系,揭示竹子不同功能叶器官的结构差异,为竹类植物的基础生物学研究提供新的理论信息。【方法】以6种竹子即勃氏甜龙竹(Dendrocalamus brandisii)、慈竹(Bambusa emeiensis)、绵竹(Lingnania intermedia)、香竹(Chimonocalamus delicatus)、云南箭竹(Fargesia yunnanensis)和美竹(Phyllostachys mannii)的营养叶、秆箨和叶枝为研究对象,观察它们的显微结构,并对其各项指标进行测量与比较。【结果】竹子营养叶解剖结构具有指状臂细胞或梅花状细胞的分化,并且具有薄壁维管鞘细胞;秆上部的箨片形态更接近于叶片,而下部的箨片具有较厚的角质层,无叶肉细胞的分化,与叶片形态差异明显。竹子营养叶的叶片、叶柄、叶鞘和叶枝维管束韧皮部的面积占比均高于木质部,与秆箨(笋箨)有显著差异。秆箨(笋箨)的箨鞘与箨片维管束木质部面积占比更高,虽然秆上部箨片形状和大小都与叶片接近,但与叶片相比,其维管束木质部面积占比更高。叶鞘和箨鞘的解剖结构与叶片和箨片的有区别,与叶柄的结构基...     

Study of reactive ion etching of Si and SiO2 for CFxCl4−x gases

A parametric study of the etching of Si and SiO₂ by reactive ion etching (RIE) was carried out to gain a better understanding of the etching mechanisms. The following fluorocarbons (FCs) were used in order to study the effect of the F-to-Cl atom ratio in the parent molecule to the plasma and the etching properties: CF₄, CF₃Cl, CF₂Cl₂, and CFCl₃ (FC-14, FC-13, FC-12, and FC-11 respectively). The Si etch rate uniformity across the wafer as a function of the temperature of the wafer and the Si load, the optical emission as a function of the temperature of the load, the etch rate of SiO₂ as a function of the sheath voltage, and the mass spectra for each of the FCs were measured. The temperature of the wafer and that of the surrounding Si load strongly influence the etch rate of Si, the uniformity of etching, and the optical emission of F, Cl, and CF₂. The activation energy for the etching reaction of Si during CF₄ RIE was measured. The etch rate of Si depends more strongly on the gas composition than on the sheath voltage; it seems to be dominated by ion-assisted chemical etching. The etching of photoresist shifted from chemical etching to ion-assisted chemical etching as a function of the F-to-Cl ratio and the sheath voltage. The etch rate of SiO₂ depended more strongly on the sheath voltage than on the F-to-Cl ratio.     

外磁场作用下的射频等离子体鞘层

采用流体近似和迁移－扩散近似分别研究了外磁场作用下射频等离子体的离子和电子动力学。特别指出了外磁场对鞘层中离子通量和能量分布的支配作用。     

Separation of micro and sub-micro diamagnetic particles in dual ferrofluid streams based on negative magnetophoresis

In the present study, we numerically demonstrate an approach for separation of micro and sub-micro diamagnetic particles in dual ferrofluid streams based on negative magnetophoresis. The dual streams are constructed by an intermediate sheath flow, after which the negative magnetophoretic force induced by an array of permanent magnets dominates the separation of diamagnetic particles. A simple and efficient numerical model is developed to calculate the motions of particles under the action of magnetic field and flow field. Effects of the average flow velocity, the ratio of sheath fluid flow to sample fluid flow, the number of the magnet pair as well as the position of magnet pair are investigated. The optimal parametric condition for complete separation is obtained through the parametric analysis, and the separation principle is further elucidated by the force analysis. The separation of smaller micro and sub-micro diamagnetic particles is finally demonstrated. This study provides an insight into the negative magnetophoretic phenomenon and guides the fabrication of feasible, low-cost diagnostic devices for sub-micro particle separation.     

Enabling High‐Voltage Lithium Metal Batteries by Manipulating Solvation Structure in Ester Electrolyte

Lithium metal is an ideal electrode material for future rechargeable lithium metal batteries. However, the widespread deployment of metallic lithium anode is significantly hindered by its dendritic growth and low Coulombic efficiency, especially in ester solvents. Herein, by rationally manipulating the electrolyte solvation structure with a high donor number solvent, enhancement of the solubility of lithium nitrate in an ester‐based electrolyte is successfully demonstrated, which enables high‐voltage lithium metal batteries. Remarkably, the electrolyte with a high concentration of LiNO₃ additive presents an excellent Coulombic efficiency up to 98.8 % during stable galvanostatic lithium plating/stripping cycles. A full‐cell lithium metal battery with a lithium nickel manganese cobalt oxide cathode exhibits a stable cycling performance showing limited capacity decay. This approach provides an effective electrolyte manipulation strategy to develop high‐voltage lithium metal batteries.     

圆柱形反应器鞘区离子平均动能的径向分布

针对鞘层结构,建立了鞘层模型和离子速度分布函数,导出了离子平均动能的积分表达式并得出数值积分的结果.用级数的两项拟合平均动能积分表达式的对数项,积分得到解析结果和简化结果.应用积分表达式、解析式及简化式进行计算,得出了圆柱形鞘层内不同位置(半径)处的粒子平均动能.结果表明鞘层越厚、粒子平均自由路程越小,则它们的差别越小.它们可有效地应用于散布在反应室各处粉体的刻蚀和纯化.     

Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target

A two-dimensional particle-in-cell simulation is used to study the time-dependent evolution of the sheath surrounding a prolate spheroid target during a high voltage pulse in plasma source ion implantation. Our study shows that the potential contour lines pack more closely in the plasma sheath near the vertex of the major axis, i.e. where a thinner sheath is formed, and a non-uniform total ion dose distribution is incident along the surface of the prolate spheroid target due to the focusing of ions by the potential structure. Ion focusing takes place not only at the vertex of the major axis, where dense potential contour lines exist, but also at the vertex of the minor axis, where sparse contour lines exist. This results in two peaks of the received ion dose, locating at the vertices of the major and minor axes of the prolate spheroid target, and an ion dose valley, staying always between the vertices, rather than at the vertex of the minor axis.     

霍尔推进器中磁化二次电子对鞘层特性的影响

为进一步研究霍尔推进器壁面二次电子发射对推进器性能的影响,采用流体模型数值模拟了二次电子磁化效应的等离子体鞘层特性.得到二次电子磁化鞘层的玻姆判据.讨论了不同的磁场强度和方向、二次电子发射系数以及不同种类等离子体推进器的鞘层结构.结果表明:随器壁二次电子发射系数的增大,鞘层中粒子密度增加,器壁电势升高,鞘层厚度减小;鞘层电势及粒子密度随着磁场强度和方位角的增加而增加;而对于不同种类的等离子体,壁面电势和鞘层厚度也不同.这为霍尔推进器的磁安特性实验提供了理论解释. 关键词： 霍尔推进器 磁鞘 二次电子