Characterization and optimization of copper chemical mechanical planarization

The feature scale planarization of the copper chemical mechanical planarization (CMP) process has been characterized for two copper processes using Hitachi 430-TU/Hitachi T605 and Cabot 5001/Arch Cu10K consumables. The first process is an example of an abrasive-free polish with a high-selectivity barrier slurry, while the second is an example of a conventional abrasive slurry with a low-selectivity barrier slurry. Copper fill planarization has been characterized for structures with conformal deposition as well as with bumps resulting from bottom-up fill. Dishing and erosion were characterized for several structures after clearing. The abrasive-free polish resulted in low sensitivity to overpolish and low saturation levels for dishing and erosion. Consequently, this demonstrated superior performance when compared to the International Technology Roadmap for Semiconductors (ITRS) 2000 roadmap targets for planarization. While the conventional slurry could achieve the 0.13-μm technology node requirements, the abrasive-free polish met the planarization requirements beyond the 0.10-μm technology node.     

用于铜的化学机械抛光液的研究

文中介绍了一种以碱性抛光液对铜进行全局平面化的方法 ,讨论了以 Si O2 水溶胶为磨料的抛光液在Cu-CMP过程中的化学 (络合 )作用及反应机理 ,并给出了抛光液的配比及上机实验结果。结果表明 :该抛光液用于对带有阻挡层和介质层的铜抛光 ,达到了对铜层的高去除速率和高选择比 ,取得了较好的全局平面化效果     

外加无机电解质对煤浆性质调控作用的研究

考察了数种无机电解质对煤浆分散体系流变特性的影响。结果发现，煤浆的流变特性不仅与电解质种类有关，还取决于煤质特征。某些煤适，适量的无机电解质可使浆体的屈报胀塑料转化为屈服假塑性。     

工业原料铁制备浆态床FT合成用的Fe-Cu-K-Si催化剂的探索

费托合成技术是公认的将煤基合成气转化为液体燃料和化工原料的重要技术途径。虽然固定床费托合成技术从五十年代起已经工业运转，但是浆态床费托合成技术由于其传热性能好，可直接使用第二代气化炉生产的富CO合成气，反应器结构简单，单台反应器生产能力大，开工率高，产品结构合理，     

Determination of mercury in soils and sediments by graphite furnace atomic absorption spectrometry with slurry sampling

A graphite furnace atomic absorption spectrometric procedure for the determination of mercury is presented, in which the samples are suspended in a solution containing hydrofluoric and nitric acids. Silver nitrate (4% m/v) and potassium permanganate (3%) are incorporated, in the order specified, and aliquots are directly introduced into the graphite furnace. A fast heating programme with no conventional pyrolysis step is used. The detection limit for mercury in a 125 mg ml⁻¹ suspension is 0.1 μg g⁻¹. Calibration is performed by using aqueous standards. The reliability of the procedure is proved by analysing certified reference materials.     

高温下淀粉的凝胶化作用

凝胶化作用是淀粉及改性产品生产过程中存在的一种现象。淀粉凝胶化作用的结果导致了在其产品中产生了只溶胀但不溶解的颗粒,从而影响了淀粉产品的整体性能。文章初步探讨了淀粉在高温成型过程中凝胶化作用的方式和起因。结果表明,淀粉浆料在高温成型过程中所产生的凝胶团粒是淀粉不完整的凝胶化作用的结果,足量的水分和高温是形成较多的凝胶化淀粉颗粒的原因。     

煤的孔结构特征对水煤浆性质的影响

本文选用１７种不同变质程度的中国煤，详细研究了煤孔结构特征对煤浆性质的影响。发现煤孔体积通过影响煤在分散体系中的吸水性，从而影响煤之成浆性。但由于不同变质程度煤表面亲水性的显著差异，煤孔体积在影响煤成浆性的能力方面差别很大，这使得煤吸水性和浆体最高煤浓度与煤孔体积并不存在直接的相关性，而是取决于煤孔体积Ｖ和以煤－水接触角（θ）的余弦值表示的煤表面亲水性因子的乘积，即煤之有效孔体积：Ｖ×ｃｏｓ（θ／     

CuCrAl和CuCrZr低温液相合成甲醇催化剂的研究

 用络合共沉淀法制备了CuCrAl和CuCrZr复合氧化物液相合成甲醇催化剂，其比表面分别达到119和116m2／g．在5．0～5．5MPa和383K条件下，分别用间歇式和流动式反应釜考察了催化剂的活性和稳定性．结果表明：CuCrAl和CuCrZr的活性均明显高于CuCr；CuCrAl的活性略高于CuCrZr，但甲酸甲酯（MF）的选择性明显低于CuCrZr；两者在12h内未见活性明显下降．甲醇钠在反应过程中部分转化为甲酸钠和NaOH．CuCrAl和CuCrZr有较高的氢解活性可抑制甲醇钠与MF生成甲酸钠，从而有较低的甲酸钠浓度．但是，Al2O3和ZrO2的酸性有利于甲醇脱水，引起甲醇钠水解生成NaOH．溶剂对CuCr基催化剂的活性和选择性有明显影响．对反应机理进行了讨论．     

不同水煤浆分散剂与煤之间的相互作用规律研究Ⅹ分散剂在煤粒表面上的吸附作用特征

研究了6种水煤浆分散剂在14种不同变质程度煤上的吸附作用特征。结果表明,多数分散剂在煤粒表面达到单层饱和吸附后,又形成多层吸附,单层饱和吸附量与煤的变质程度、比表面积以及分散剂的性质有关。在相同粒度分布下,煤的变质程度越低,表面含氧亲水官能团的比例越高,孔隙率越高,比表面积越大,这对增大吸附量有利。煤的变质程度越高,其表面疏水区面积的比例越高,分散剂通过疏水基团紧密吸附在煤表面的比例越大,这对增加高阶煤的吸附量有利。对不同煤,是变质程度还是比表面积为吸附分散剂的主控因素,主要依赖于分散剂的结构与性质。对同种煤,疏水与亲水基团呈线型分立分布的分散剂,吸附量明显高;而疏水与亲水基团呈线型间隔分布的分散剂,吸附量明显小。     

Determination of arsenic in mussels by slurry sampling and electrothermal atomic absorption spectrometry (ETAAS)

A method for the determination of arsenic in slurries of mussel tissue using palladium-magnesium nitrate as modifier was optimized. The slurry was stabilized by a 0.015% (v/v) of Triton X-100. To achieve complete mineralization the slurries were ashed at 480 °C for 10s in an air flow (50 ml/min) and at 1200 °C for 15s in an argon flow (300 ml/min) in the presence of Pd—Mg(NO₃)₂ as modifier. The optimum atomization temperature was 2200 °C. The precision and accuracy of the method were studied using the Reference Material BCR n ° 278 Mussel Tissue (Mytilus edulis). The detection limit (LOD) of the final slurry solution was 1 g/l of arsenic corresponding to an arsenic level in the mussel of 1.3 g/g, for a 0.5% (m/v) slurry. Results of calibration using aqueous standards and the standard additions method were compared. The method was applied to the determination of arsenic in mussels from the Galician coast. The levels found lie between 2 and 9.3 g/g of arsenic.