Structural,morphological and mechanical properties of niobium nitride thin films grown by ion and electron beams emanated from plasma

The influence of variation in plasma deposition parameters on the structural, morphological and mechanical characteristics of the niobium nitride films grown by plasma-emanated ion and electron beams are investigated. Crystallographic investigation made by X-ray diffractometer shows that the film synthesized at 10?cm axial distance with 15 plasma focus shots (PFS) exhibits better crystallinity when compared to the other deposition conditions. Morphological analysis made by scanning electron microscope reveals a definite granular pattern composed of homogeneously distributed nano-spheroids grown as clustered particles for the film synthesized at 10?cm axial distance for 15 PFS. Roughness analysis demonstrates higher rms roughness for the films synthesized at shorter axial distance and by greater number of PFS. Maximum niobium atomic percentage (35.8) and maximum average hardness (19.4?±?0.4?GPa) characterized by energy-dispersive spectroscopy and nano-hardness analyzer respectively are observed for film synthesized at 10?cm axial distance with 15 PFS.     

用低压反应离子镀技术制备的类金刚石薄膜及其表征

以Ar气作为工作气体,CH4作为反应气体,利用低压反应离子镀(RLVIP)技术在Ge基底上成功制备出类金刚石(DLC)薄膜.通过拉曼光谱、Perking Elmer GX型红外光谱仪和Nano Indenter XP型纳米压痕硬度测试计分别表征了类金刚石薄膜的微观结构、光学性能和机械性能.结果表明,类金刚石薄膜(ID ...     

Li2O-Al2O3-SiO2微晶玻璃表面粗糙度对纳米硬度测试的影响

 介绍了纳米压痕测试技术的基础理论及纳米压痕法常用的Oliver -Pharr方法的计算原理。采用纳米压痕试验测得不同表面粗糙度的Li2O-Al2O3-SiO2微晶玻璃样品的纳米硬度、弹性模量和载荷-位移曲线。结果表明样品表面粗糙度会降低纳米压痕测试结果的稳定性、准确性和可靠性：样品表面粗糙度越小,测得的纳米硬度和弹性模量值波动越小,载荷-位移曲线重合性越高。随着最大载荷的增大,测得的弹性模量逐渐减小,其原因是压痕边缘材料发生了塑形变形。在超光滑表面样品（Ra=0.9 nm）上测得较为准确的Li2O-Al2O3-SiO2微晶玻璃纳米硬度和弹性模量值分别为8.8 GPa和7.79 GPa。纳米压痕测试结果的重合度对于评价超光滑表面完整性研究具有指导意义。     

金刚石涂层的纳米压痕力学性能研究

用HFCVD法在硬质合金刀具上制备了CVD金刚石涂层,利用纳米压痕仪研究了CVD金刚石涂层的硬度和弹性模量等力学性能.结果表明,反应室气压、衬底温度、反应气体中CH4含量、沉积时间等参数改变了CVD金刚石膜中sp2成分含量、晶界数量及晶界上缺陷,从而影响CVD金刚石涂层的纳米硬度和弹性模量.较高或较低的衬底温度都会导致硬质合金刀具上CVD金刚石涂层的纳米硬度、弹性模量降低;随着反应室气压、反应气体中CH4含量的增加,硬质合金刀具上CVD金刚石涂层的纳米硬度、弹性模量降低;沉积时间低于6 h时,沉积时间对硬质合金刀具上CVD金刚石涂层的纳米硬度、弹性模量影响显著,沉积时间超过6 h后,沉积时间对硬质合金刀具上CVD金刚石涂层的纳米硬度、弹性模量逐渐趋向稳定.     

AZ91镁合金激光冲击强化力学性能研究

为了研究激光冲击强化对镁合金力学性能的影响以及不同激光冲击模式的效果,采用双束无叠加钕玻璃脉冲激光对AZ91镁合金进行冲击处理;冲击后在试样表面得到椭圆冲击斑,对光斑形貌和形状进行了观测分析,并与传统单点叠加冲击模式的结果对比。采用Triboindenter纳米压痕仪测试了冲击和未冲击区域的纳米硬度,得到测量值分别为1.59GPa和1.47GPa;采用X2350A型X射线应力衍射仪测试冲击区域残余应力分布情况,并用有限元软件ABAQUS对残余应力进行了数值模拟,得到实验测量和模拟结果在加载区域都有高达-120MPa左右的残余应力分布,且模拟结果与实验结果一致。结果表明,采用双束无叠加冲击模式可以提高冲击效率;激光冲击处理提高了镁合金的纳米硬度和力学性能,增强了其抗外物冲击损伤和抗疲劳性能。