折射型微透镜列阵的光刻热熔法研究

研究了制作折射型微透镜列阵的一种新方法光刻胶热熔成形法，获得了２０×２０的折射型微透镜列阵，单元微透镜相对口径为Ｆ／２，单元透镜直径为９０μｍ，中心间隔１００μｍ，透镜的波像差小于１．３波长。本文详细阐述了光刻热熔法的基本原理及微透镜设计方法，并讨论了工艺参数对微透镜列阵质量的影响。     

A micromachined, shadow-mask technology for the OMVPE fabrication of integrated optical structures

A micromachined, silicon shadow-mask technology is described which extends the capabilities of shadow-masked OMVPE for the fabrication of nonplanar micro-optical elements. The deep reactive ion etched (DRIE) shadow mask is inexpensive, reusable and produces smooth, nonplanar structures with precise control of position, shape and size. Direct fusion bonding of the mask to the substrate was found to be a reliable and reproducible method for attaching the mask to the substrate during growth. The DRIE shadow mask technology allows the deposition of microlenses with focal lengths out to 3 mm without the central flattening that was previously observed in shadow masked lenses grown under the epitaxial mask. We also describe novel applications of this technology in the fabrication of micromirrors and concentrically-variable Bragg reflectors, which should improve mode discrimination in large aperture VCSELs.     

飞秒激光加工微光学元件的研究

利用低功率飞秒激光振荡器进行材料表面加工的研究并将其应用于微光学元件的加工制作领域;对飞秒激光倍频光以及飞秒激光与光刻胶材料相互作用进行了实验;以光刻胶作为牺牲层进行表面加工获得了各种玻璃光栅及光掩模板;利用光学显微镜和原子力显微镜(AFM)对实验结果进行检测,得到微米量级的特征线宽;所得光栅的光学性能通过He-Ne激光器进行检测,实验结果与理论值一致。该研究为微光学元件的加工制作提供了新的方法。     

光波强衰场悬浮颗粒检测中的显微摄像术

被烟尘、粉末、水雾等充斥的空间对光波有极强的衰减作用,统称为强衰场。普通的摄像技术不可能从此类强衰场中获取清晰的图像。融合了显微光学原理和CCD摄像技术的显微摄像术与相应的技术手段配合,可以摄取强衰场中悬浮颗粒的放大图像,并实现远距离传输和多用户监测,从而为强衰场悬浮颗粒检测实践了一条新思路。     

微型光谱仪的发展

随着MEMS、微光学等微制造技术的发展,光谱仪器的微型化成为可能,光谱仪的微型化是光谱仪器的一个重要发展方向。本文根据国内外正在进行的微型光谱仪的研制工作,对微型光谱仪的发展进行了比较全面的综述,最后对研究微型光谱仪的意义进行了总结。     

明胶用于制作保真沟形微光学元件的酶蚀显形技术

在分析未硬化重铬酸盐明胶水洗显影工艺沟形保真能力差的原因的基础上，提出了用预硬化明胶来制作高保真沟形微光学元件的酶蚀显影技术。并实验验证了这种技术的可行性。初步结果令人满意     

Optical Perfect Shuffle Interconnection Using Computer-Generated Blazed Grating Array

In this paper a new type element that can implement perfect shuffle (PS) network of free spatial optical interconnection is presented. It is a microoptics array element consisting of a series of sub-blazed gratings with different spatial frequency. The array has highly efficient light energy and a very simple setup. It can realize 1-D, 2-D PS networks and their inverse transforms. Also, the array can conveniently realize microminiaturization and multilevel interconnection and other forms of interconnections.Presented at the International Commission for Optics Topical Meeting, Kyoto, 1994.     

Characterization of Microoptic Arrays by Evaluation of the Axial Confocal Response

Fast characterisation and defect recognition of microlens arrays is a problem unsolved. Results of measurements using a system based on the confocal principle working in parallel to determine spherical aberrations, focal lengths and void elements of microoptic arrays are presented.     

Novel Method for Making MicroopticsElements with Continuous Relief

l.IntroductionMicroopticselementshasacceptedsPecialinterestingforitsabilityofgeneratearbi-trarydiffractionwave-front.BinarymethodhasbeencommonlyusedtomakeMOE,thismethodisengagedseveralmasksandseveraltimesofetchingtoapproachacontinuousre-lief,averyhighaccuracyofa1ignmentisrequried,theprocessingiscomp1exandtimeconsuming.ThereareseveralotherwaystofabricateMoEwithcontinuousreIief.Oneisholcagraphicrecording,thismethodcanproduceMoEwithlarSearea,butthefataldefectisthelowerdiffractionefficiency.A…     

Optical Properties of a Polarization Converting Device Using a Nematic Liquid Crystal Cell

A radially and homogeneously aligned LC cell as a polarization controlling device is fabricated using a memory effect in an axially symmetric electrical field. Optical properties and the molecular orientation of the LC cell are investigated and the conversion property of the polarization states of the cell is discussed in detail from the molecular orientation in the cell.On leave from Advantest Laboratories, Ltd., 48-2 Matsubara, Kamiayashi, Aoba-ku, Sendai, 989-31 Japan.