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用相位调制方法测量光盘盘基应力双折射的精度分析 总被引:4,自引:2,他引:2
偏振相位调制方法是测量微小双折射的一种高精度检测方法。本文系统全面地分析了以PMCSA结构形式测量光盘盘基应力双折射的相位调制方法中,由各种误差源造成的对测试结果的影响。 相似文献
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Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern 总被引:1,自引:0,他引:1
A method for measuring external diameters of metal cylinders is proposed in which a sinusoidally vibrating interference pattern (SVIP) of 100-μm period is used as an exact scale. Lights from the end-points of a metal cylinder are extracted with a spatial filtering in an imaging system to form a cross-sectional image of the metal cylinder. On the image a sinusoidally phase-modulated signal owing to the SVIP is detected with a CCD image sensor to measure the phases of the SVIP at the two end-points of the cylinder. The coordinates of the two end-points are obtained from the phases at the two end-points, the phase distribution of the SVIP, and the coordinates of the pixels of the CCD image sensor. Metal cylinder diameters of 7.99, 8.00, and 9.00 mm are measured along their length directions with an error less than 1 μm. 相似文献
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We propose a sinusoidal wavelength-scanning interferometer for measuring thickness and surface profile of a thin film. The interference signal contains phase modulation amplitude Z and phase $aL which are related to the positions and profiles of the reflecting surfaces, respectively. By reducing the difference between the detected signal and the estimated signal using the multidimensional nonlinear least-squares algorithm, we estimate values of Z and $aL. Experimental results show that the front and rear surfaces of a silica glass plate of 20 $mUm-thickness could be measured with an error less than 10 nm. 相似文献
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In this paper we use a superluminescent diode (SLD) as the light source of an interferometer and extract a narrow spectrum from a wide spectrum of the SLD with a Fabry-Perot Etalone (FPE). By varying sinusoidally the distance between the two mirrors of FPE, the central wavelength of the narrow spectrum is scanned sinusoidally. The distance between the mirrors is exactly set by a feedback control system, and sinusoidal phase-modulated SLD light that has a large scanning width of about 10 nm can be obtained with high stability and spatial uniformity. The phase of the interference signal has two different components. One is amplitude Zb of sinusoidal phase modulation, which is proportional to the optical path difference (OPD) and the scanning width. The other is conventional phase α, which provides a fractional value of the OPD in the range of the wavelength. By combining the two values of the OPD obtained from Zb and α, an exact OPD larger than the wavelength can be measure with ment accuracy in α. Characteristics of the interferometer are made clearly through step-profile measurements. 相似文献
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