基于谐振原理的硅微机械加速度计

基于力学振动原理 ,导出敏感梁类谐振振动的微分方程 ,给出了振梁型加速度计的设计原理。指出了加速度计谐振梁频率的相对变化量与梁的厚度无关 ;为避免输出非线性频率信号 ,频率的相对变化率和激励振动的振幅都不宜太大     

A Soft,Fast and Versatile Electrohydraulic Gripper with Capacitive Object Size Detection

Soft robotic grippers achieve increased versatility and reduced complexity through intelligence embodied in their flexible and conformal structures. The most widely used soft grippers are pneumatically driven; they are simple and effective but require bulky air compressors that limit their application space and external sensors or computationally expensive vision systems for pick verification. In this study, a multi-material architecture for self-sensing electrohydraulic bending actuators is presented that enables a new class of highly versatile and reconfigurable soft grippers that are electrically driven and feature capacitive pick verification and object size detection. These electrohydraulic grippers are fast (step input results in finger closure in 50 ms), draw low power (6.5 mW per finger to hold grasp), and can pick a wide variety of objects with simple binary electrical control. Integrated high-voltage driving electronics are presented that greatly increase the application space of the grippers and make them readily compatible with commercially available robotic arms.     

Electrocapacitive Deionization: Mechanisms,Electrodes, and Cell Designs

Capacitive deionization (CDI) is an emerging water desalination technology for removing different ionic species from water, which is based on electric charge compensation by these charged species. CDI is becoming popular because it is more energy-efficient and cost-effective than other technologies, such as reverse osmosis and distillation, specifically in dealing with brackish water having low or moderate salt concentrations. Over the past decade, the CDI research field has witnessed significant advances in the used electrode materials, cell architectures, and associated mechanisms for desalination applications. This review article first discusses ion storage/removal mechanisms in carbon and Faradaic materials aided by advanced in situ analysis techniques and computations. It then summarizes research progress toward electrode materials in terms of structure, surface chemistry, and composition. More still, it discusses CDI cell architectures by highlighting their different cell design concepts. Finally, current challenges and future research directions are summarized to provide guidelines for future CDI research.     

Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

The fabrication of silicon based micromechanical sensors often requires bulk silicon etching after aluminum metallization. All wet silicon etchants including ordinary undoped tetramethyl ammonium hydroxide (TMAH)-water solution attack the overlaying aluminum metal interconnect during the anisotropic etching of (100) silicon. This paper presents a TMAH-water based etching recipe to achieve high silicon etch rate, a smooth etched surface and almost total protection of the exposed aluminum metallization. The etch rate measurements of (100) silicon, silicon dioxide and aluminum along with the morphology studies of etched surfaces are performed on both n-type and p-type silicon wafers at different concentrations (2, 5, 10 and 15%) for undoped TMAH treated at various temperatures as well as for TMAH solution doped separately and simultaneously with silicic acid and ammonium peroxodisulphate (AP). It is established through a detailed study that 5% TMAH-water solution dual doped with 38 gm/l silicic acid and 7 gm/l AP yields a reasonably high (100) silicon etch rate of 70 μm/h at 80 °C, very small etch rates of SiO₂ and pure aluminum (around 80 Å/h and 50 Å/h, respectively), and a smooth surface (±7 nm) at a bath temperature of 80 °C. The etchant has been successfully used for fabricating several MEMS structures like piezoresistive accelerometer, vaporizing liquid micro-thruster and flow sensor. In all cases, the bulk micromachining is carried out after the formation of aluminum interconnects which is found to remain unaffected during the prolonged etching process at 80 °C. The TMAH based etchant may be attractive in industry due to its compatibility with standard CMOS process.     

以聚乙二醇-b-聚四乙烯基吡啶为模板制备聚联苯胺微/纳米颗粒及其电容特性

以两亲性嵌段共聚物聚乙二醇-b-聚四乙烯基吡啶(PEO-b-P4VP)为模板制备聚联苯胺微/纳米颗粒,调节模板剂胶束溶液pH,得到了一系列形貌和尺寸可控的聚联苯胺微/纳米颗粒。利用红外光谱、核磁共振、透射电镜、循环伏安、恒电流放电、交流阻抗等测试对材料的结构和性能进行了表征。模板法合成的聚联苯胺为平均直径小于200nm的亚微米至纳米级棒状颗粒,其直径随着模板剂胶束溶液pH的降低而增加。所得聚联苯胺颗粒均显示了一定的电化学活性,当电流密度为1A/g时,聚联苯胺的比电容量达到306.3F/g,经过长时间的充放电测试,不同条件下合成的聚联苯胺的容量衰减率均很小,表现出良好的循环稳定性且各样品电化学性能呈现出随着直径的减小而增强的趋势。     

Targeted Construction of Amorphous MoSx with an Inherent Chain Molecular Structure for Improved Pseudocapacitive Lithium-Ion Response

Owing to low ion/electron conductivity and large volume change, transitional metal dichalcogenides (TMDs) suffer from inferior cycle stability and rate capability when used as the anode of lithium-ion batteries (LIBs). To overcome these disadvantages, amorphous molybdenum sulfide (MoS_x) nanospheres were prepared and coated with an ultrathin carbon layer through a simple one-pot reaction. Combining X-ray photoelectron spectroscopy (XPS) with theoretical calculations, MoS_x was confirmed as having a special chain molecular structure with two forms of S bonding (S²⁻ and S₂²⁻), the optimal adsorption sites of Li⁺ were located at S₂²⁻. As a result, the MoS_x electrode exhibits superior cycle and rate capacities compared with crystalline 2H-MoS₂ (e.g., delivering a high capacity of 612.4 mAh g⁻¹ after 500 cycles at 1 A g⁻¹). This is mainly attributed to more exposed active S₂²⁻ sites for Li storage, more Li⁺ transfer pathways for improved ion conductivity, and suppressed electrode structure pulverization of MoS_x derived from the inherent chain-like molecular structure. Quantitative charge storage analysis further demonstrates the improved pseudocapacitive contribution of amorphous MoS_x induced by fast reaction kinetics. Moreover, the morphology contrast after cycling demonstrates the dispersion of active materials is more uniform for MoS_x than 2H-MoS₂, suggesting the MoS_x can well accommodate the volume stress of the electrode during discharging. Through regulating the molecular structure, this work provides an effective targeted strategy to overcome the intrinsic issues of TMDs for high-performance LIBs.     

A Polyoxometalate-Based Binder-Free Capacitive Deionization Electrode for Highly Efficient Sea Water Desalination

Capacitive deionization is a promising technique in sea water desalination. Compared with common electrodes, mixed capacitive-deionization electrodes exhibit better performance in sea water desalination because they integrate pseudocapacitance and electric double-layer capacitance in one system. Herein, a 3D binder-free mixed capacitive-deionization electrode was fabricated by direct electrodeposition of SiW₁₂O₄₀⁴⁻ and polyaniline on a 3D exfoliated graphite carrier. In this electrode, SiW₁₂O₄₀⁴⁻/polyaniline composite particles with a size of about 100–120 nm are dispersed homogenously on the 3D exfoliated graphite carrier. Its specific capacitance reaches 352 F g⁻¹ at 1 A g⁻¹. With increasing current from 1 to 20 A g⁻¹, the specific capacitance only decays by 32 %. When employed in sea water desalination, the performance of this mixed capacitive-deionization electrode is also excellent. At 1.2 V, the salt adsorption capacity of this mixed electrode reaches 23.1 mg g⁻¹ with a salt adsorption rate of 1.38 mg g⁻¹ min⁻¹ in 500 mg L⁻¹ NaCl. The performance of this electrode is well retained after 30 cycles. The excellent sea water desalination performance originates from the synergistic effect between SiW₁₂O₄₀⁴⁻ and polyaniline. This work has developed polyoxometalate as a new material for capacitive-deionization electrodes.     

Fabrication and Characterization of Zinc Oxide Nanowire Based Two-electrode Capacitive Biosensors on Flexible Substrates for Estimating Glucose Content in a Sample

The present work deals with fabrication and characterization of the zinc oxide (ZnO) nanowire based novel two-electrode capacitive biosensors on flexible Polyethylene terephthalate (PET) substrates for accurate estimation of glucose by analyzing the fundamental dielectric nature of the relevant sample. The morphology and crystalline quality of grown nanowires are analyzed by using field-emission scanning electron microscope (FESEM) and X-ray diffractometer (XRD), respectively. Current and capacitance values of the device have been studied for ten different glucose concentrations relevant to the physiological standards. The analytical performance of the devices in terms of enzyme activity, reliability and flexibility has also been evaluated.     

Maximization of Spatial Charge Density: An Approach to Ultrahigh Energy Density of Capacitive Charge Storage

Capacitive energy storage has advantages of high power density, long lifespan, and good safety, but is restricted by low energy density. Inspired by the charge storage mechanism of batteries, a spatial charge density (SCD) maximization strategy is developed to compensate this shortage by densely and neatly packing ionic charges in capacitive materials. A record high SCD (ca. 550 C cm^?3) was achieved by balancing the valance and size of charge‐carrier ions and matching the ion sizes with the pore structure of electrode materials, nearly five times higher than those of conventional ones (ca. 120 C cm^?3). The maximization of SCD was confirmed by Monte Carlo calculations, molecular dynamics simulations, and in situ electrochemical Raman spectroscopy. A full‐cell supercapacitor was further constructed; it delivers an ultrahigh energy density of 165 Wh L^?1 at a power density of 150 WL^?1 and retains 120 Wh L^?1 even at 36 kW L^?1, opening a pathway towards high‐energy‐density capacitive energy storage.     

不同形貌氧化镍纳米材料的合成及其电化学性能

以水-乙二醇为溶剂,以聚乙烯吡咯烷酮(PVP)为表面活性剂,采用溶剂热法合成了NiO纳米片,NiO纳米薄片通过自组装形成花状结构。 改变反应温度和溶剂,制备了NiO纳米立方体颗粒和NiO纳米球形颗粒。 用合成的NiO纳米材料制备工作电极,在6 mol/L的KOH溶液中利用三电极体系进行了电化学性能测试。 在电化学性能测试中进行了循环伏安测试、恒电流充放电测试和电化学阻抗谱(EIS)测试。 结果表明,NiO纳米片的比电容最高(在电流密度为0.5 A/g时比电容值为402 F/g),倍率性能最佳(0.5 A/g增加至4 A/g时有80.1%的电容保持率)。 在电流密度为4 A/g时对NiO纳米片进行1000次恒流充放电循环测试,比电容损失了9.7%。