选择外延MOCVD研制DFB激光器和模斑转换器集成器件

研究了利用选择外延生长的InGaAsP材料的厚度增强因子和带隙波长的性质,最大的厚度增强因子为2.9.利用选择外延技术研制的DFB激光器和模斑转换器的集成器件,阈值为10.8mA-在60mA下输出功率为10mW,边模抑制比为35.8dB,垂直方向上的远场发散角从34°减少到9°,垂直方向上的1dB偏调容差为3.4μm.     

选择外延MOCVD研制DFB激光器和模斑转换器集成器件

研究了利用选择外延生长的InGaAsP材料的厚度增强因子和带隙波长的性质,最大的厚度增强因子为2.9.利用选择外延技术研制的DFB激光器和模斑转换器的集成器件,阈值为10.8mA-在60mA下输出功率为10mW,边模抑制比为35.8dB,垂直方向上的远场发散角从34°减少到9°,垂直方向上的1dB偏调容差为3.4μm.     

准连续调谐35nm的SGDBR激光器的研制

对接生长技术可以独立优化不同区域的波导结构,有利于制作高性能的半导体光电子集成器件. 文中采用MOCVD对接生长技术制作了SGDBR激光器,通过载流子注入,器件准连续调谐范围为35nm,在调谐范围内边模抑制比大于30dB.     

MOCVD实现InGaAsP波导对接生长的研究

采用低压MOCVD技术,通过对接界面和对接工艺的优化,获得了高质量的InGaAsP材料构成的对接波导,测量得到的对接波导光学损耗为7cm-1,说明该技术可以用来制作高质量的光电子集成器件.     

用于10Gbit/s传输的对接集成DFB-LD/EA-MD光源

报道了用于10Gbit/s传输的DFB激光器和EA调制器对接集成器件的设计、制作和器件特性.工作主要集中于两个方面:提高激光器和调制器间的光学耦合;通过减小调制器电容提高调制带宽.集成器件显示出了良好的静态和高频特性:阈值电流典型值为15mA,最小值为8mA;100mA激光器偏置电流下,输出功率大于10mW;对消光比、电学回波损耗和调制带宽进行了测试,3dB带宽的测量值超过10GHz.     

选择外延技术研制1.5μm DFB激光器和自对准模斑转换器集成器件

利用选择外延技术研制了1.5μm DFB激光器和自对准模斑转换器单片集成器件.激光器的上限制层与垂直方向上楔型波导的模斑转换器同时选择性生长 ,这样的方法不仅可以分别优化有源区和模斑转换器的材料,同时可以降低选择性生长对接结构的难度.所研制集成器件的阈值为4.4mA,在49.5mA下的输出功率为10.1mW,边模抑制比为33.2dB,垂直方向和水平方向上的远场发散角分别为9°和15°,1dB偏调容差分别为3.6μm和3.4μm.     

Butt-Joint Monolithically Integrated DFB-LD/EA-MD Light Source for 10Gbit/s Transmission

This paper reports on the design,fabrication，and performance of an integrated electro-absorptive modulated laser based on butt-joint configuration for 10Gbit/s application.This paper mainly aims at two aspects.One is to improve the optical coupling between the laser and modulator;another is to increase the bandwidth of such devices by reducing the capacitance parameter of the modulator.The integrated devices exhibit high static and dynamic characteristics. Typical threshold current is 15mA,with some value as low as 8mA.Output power at 100mA is more than 10mW.The extinction characteristics,modulation bandwidth,and electrical return loss are measured.3dB bandwidth more than 10GHz is monitored.     

DFB激光器阵列与MMI耦合器、SOA的单片集成

采用变脊宽原理和对接生长技术,设计并制作了4通道分布反馈(DFB)激光器阵列与多模干涉(MMI)耦合器、半导体光放 大器(SOA)的单片集成器件。在25℃的测试温度下,激光器的阈值电 流约55~60mA;当激光器注入150mA、SOA 注入50mA电流时,各通道的出光功率保持在2mW以上,出射波长 处于1550nm波段,边模抑制比(SMSR)大于33 d B,4通道可实现单独或同时工作。     

Butt-joint regrowth method by MOCVD for integration of evanescent wave coupled photodetector and multi-quantum well semiconductor optical amplifier

We have realized integration of evanescent wave coupled photodetector (ECPD) and multi-quantum well (MQW) semiconductor optical amplifier (SOA) on MOCVD platform by investigating butt-joint regrowth method of thick InP/InGaAsP waveguides to deep etched SOA mesas. The combination of inductively coupled plasma etching and wet chemical etching technique has been studied to define the final mesa shape before regrowth. By comparing the etching profiles of different non-selective etchants, we have obtained a controllable non-reentrant mesa shape with smooth sidewall by applying one step 2HBr:2H₃PO₄:K₂Cr₂O₇ wet etching. A high growth temperature of 680 ℃ is found helpful to enhance planar regrowth. By comparing the growth morphologies and simulating optical transmission along different directions, we determined that waveguides should travel across the regrowth interface along the [110] direction. The relation between growth rate and mask design has been extensively studied and the result can provide an important guidance for future mask design and vertical alignment between the active and passive cores. ECPD-SOA integrated device has been successfully achieved by this method without further regrowth steps and provided a responsivity of 7.8 A/W. The butt-joint interface insertion loss is estimated to be 1.05 dB/interface.     

High performance of 1.55 μm DFB integrated with vertically tapered self-aligned spot-size converter

A new type of self-aligned spotsize converter (SSC) integrated 1.55 m DFB lasers had been proposed in this article. The upper optical confinement layer and the butt-coupled tapered thickness waveguide were regrown simultaneously, which not only offered the separate optimization of the active region and the integrated SSC, but also reduced the difficulty of the butt-joint selective regrowth. The vertical and horizontal far field angles were 9° and 12° respectively, the 1- dB misalignment tolerance were both 3.6 and 3.4 m. The directed coupling efficiency to tapered single mode fiber was 48%.