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本文主要设计了一种新型的基于喇曼奈斯声光衍射的微光机电加速度计。它主要由一个声光移频器与一系列光波导构成。文章首先对器件的基础理论与基本原理做了简要的介绍。然后设计了一种基于弯曲板波的延迟线振荡器做为声光移频器,其克莱因-考克参数为0.38。设计了厚度2微米,宽度0.6微米的单模光波导用于光的传输,同时还设计了波导偏振器以保证波导内的光具有相同的偏振方向。接着,基于前文的设计,文中提出了基于硅工艺的器件加工方案与流程,并详细讨论了加工流程中存在的难点与问题。最后针对提出的难点与问题进行了一系列的工艺实验,找到了解决难点和问题并复合设计要求的工艺条件与参数,实验结果表面本文提出的器件的设计与加工是可靠可行的。 相似文献
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Theoretical expressions and their approximate formulae for the intensities of light diffracted by two adjacent ultrasonic beams are discussed and compared with experimental data for the case when the second beam is an even harmonic of the first (fundamental). In the special case of the fundamental and its second or fourth harmonic, relatively simple formulae are found for the first and second diffraction orders describing the variation of light intensity with phase shift and intensity ratio.The approximate formulae describe the experiments satisfactorily only for small values of ζ1 and αn. For higher values the exact formulae give better agreement. Only the Raman-Nath region is considered. 相似文献
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The transition from the Raman-Nath to a Bragg regime for holographic grating diffracted fields is studied using a new integral equation and Fourier transform techniques. Analytical and numerical studies are presented and evaluated. 相似文献
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Fluctuations of optical phase of diffracted light for Raman–Nath diffraction in acousto–optic effect 下载免费PDF全文
The Raman–Nath diffraction in acousto–optic effect was studied theoretically and experimentally in the paper.Up to now,each order of diffracted light in Raman–Nath diffraction was still considered simply to be just frequency-shifted and to be a plane wave.However,we find that the phase and frequency shifts occur simultaneously and individually in Raman–Nath diffraction.The findings demonstrate that,in addition to the frequency shift,the optical phase of each order of diffracted light is also shifted by the sound wave and fluctuates with the sound wave and is related to the location in the acoustic field from which the diffracted light originates.As a result,the wavefront of each order of diffracted light is modulated to fluctuate spatially and temporally with the sound wave.Obviously,these findings are significant for applications of Raman–Nath diffraction in acousto–optic effect because the optical phase plays an important role in optical coherence technology. 相似文献