半导体混合加工制程的虚拟量测方法

为提高经济效应,半导体加工制程变得越来越复杂,生产线上同时有不同规格的产品在混合加工,能够同时预测这些规格晶圆的最终品质对提高晶圆的生产良率有着重要的意义。本文针对这种混合制程,提出一种虚拟量测算法,在统计回归的基础上,找出影响制程的关键变量,考虑不同规格晶圆的产品效应,利用共变异数分析算法辨识出虚拟量测模型,线上测试结果表明,本文算法不仅可以精确的预测待加工晶圆的线宽,而且可以用于半导体加工制程晶圆的故障侦测。     

Development of a virtual metrology for high-mix TFT-LCD manufacturing processes

Nowadays,TFT-LCD manufacturing has become a very complex process,in which many different products being manufactured with many different tools.The ability to predict the quality of product in such a high-mix system is critical to developing and maintaining a high yield.In this paper,a statistical method is proposed for building a virtual metrology model from a number of products using a high-mix manufacturing process.Stepwise regression is used to select key variables that really affect the quality of th...