Implementation of electron beam grey scale lithography and proximity effect correction for silicon nanowire device fabrication

An electron beam lithography exposure strategy combining efficient proximity effect correction (PEC) with multi-pass grey scale is compared with a more conventional strategy based on a single-pass exposure without PEC. Exposure results for different types of nanowire structures are presented. Line edge and line width roughness (LER and LWR) values for both approaches are determined. The novel exposure strategy presented in this work reduced LER by ∼25% and LWR by ∼40%.     

多协议标记交换（MPLS）技术

从IP与ATM结合技术的演变入手，阐述了MPLS的基本原理，并重点介绍了LSP的建立过程。同时，对MPLS的控制协议进行了比较。     

镍、锌、钴(II)-N-(对位取代苯基)亚氨基二乙酸的量热

使用改进的RD-1型热导式量热计测定了镍（Ⅱ）-、钴（Ⅱ）-、锌（Ⅱ）-N-（对位取代苯基）亚氨基二乙酸等三个二元配位体系的生成热．这些配合物的生成热不仅与配体的质子化热之间存在着线性关系，而且它们的大小按金属离子来说是完全符合Irving-Williams序列的，并利用配体的多环水化结构解释了N-（取代苯基）亚氨基二乙酸根质子化热呈正值（吸热）的实验事实。     

MPLS技术研究及其应用

多协议标记交换(MPLS)技术将网络层路由功能与数据链路层交换功能结合,充分利用第二层和第三层功能,使IP网具备高速交换、流量控制和QoS等性能。文章介绍了MPLS技术的基本原理、核心技术及其应用。     

A multi-resolution approach for line-edge roughness detection

A wavelet-based line-edge detection framework is presented that proves to be solely image-dependent. In this analysis, surfaces are considered as a combination of an underlying surface structure and a surface detail, corresponding to low-frequency and high-frequency features, respectively. Through the multi-scale analysis offered by wavelet decomposition, the underlying surface structure is extracted and used to define the line-edge searching region, which, in turn, helps characterize the line-edge roughness (LER), providing valuable information for the evaluation of device fabrication and performance. We focus on exploring the optimal wavelet decomposition, to better separate the underlying structure and the surface detail, using a number of metrics including the Shannon’s entropy, k-means clustering and the flatness factor. The impact of different wavelet functions and resolution levels on line-edge roughness characterization is discussed. An SEM image of a plane diffraction grating is studied to demonstrate the application of the proposed framework.     

A Study of Self-adaptive X/Y Flow Classification Method in LER

1　ＩｎｔｒｏｄｕｃｔｉｏｎＭＰＬＳ (Ｍｕｌｔｉ ｐｒｏｔｏｃｏｌＬａｂｅｌＳｗｉｔｃｈｉｎｇ)ｉｓｎｏｔｏｎｌｙｔｈｅｍｏｓｔｔｙｐｉｃａｌｉｎｔｅｇｒａｔｉｎｇｍｏｄｅｌｏｆＡＴＭａｎｄＩＰｂｕｔａｌｓｏａｇｒｅａｔｃｈａｎｇｅｉｎｔｒａｄｉｔｉｏｎａｌｒｏｕｔｅｒｏｆｉｔｓａｒｃｈｉｔｅｃｔｕｒｅ.ＭＰＬＳｉｎｔｒｏｄｕｃｅｓｃｏｎｎｅｃｔｅｏｒｉｅｎｔｅｄｍｅａｓｕｒｅｓｉｎｔｏｔｒａｄｉｔｉｏｎａｌｎｏｎ ｃｏｎｎｅｃｔｅｄＩＰｎｅｔｗｏｒｋｓｔｈｒｏｕｇｈＬＤＰ (ＬａｂｅｌＤｉｓｔｒｉｂ…     

宽带MPLS网络技术综述

多协议标记交换（ＭＰＬＳ）是实现宽带Ｉｎｔｅｒｎｅｔ的一种新兴的网络技术。本文讲述了ＭＰＬＳ的发展历史,在总体上对ＭＰＬＳ的网络构成、基本概念、工作过程等原理进行了简明的阐述,并将其与传统标记交换作了比较,最后指出在ＭＰＬＳ还需完善的一些问题。     

光谱拟合反演法制备高显色指数白光LED的研究

荧光粉受激发产生的白光LED照明光源存在显色指数较低的问题.对此提出一种利用光谱拟合反演高显指目标光谱的方法,针对已知白光LED计算提高该光源所需补充的单色光LED种类及光谱系数.利用光谱拟合方法分析添加不同波段的光谱对白光LED显指和色温的影响.并通过拟合反演的方法进行补光设计,使用一到两种单色光LED,将冷白光源和中性白光源的显指分别提高至92.3和96.8.实验结果表明,使用红光与蓝绿光、低波长绿光LED补光后,大幅度提高了荧光粉受激发产生的白光LED光源的显色性.     

采用Intel网络处理器实现MPLS路由器

多协议标签交换(MPLS)作为下一代网络的核心技术，在越来越多的网络设备中获得了应用。网络处理器具有强大的线速分组处理能力和灵活的可编程性。重点介绍了采用Intel网络处理器实现MPLS路由器的软件结构，为使用网络处理器的研发人员提供了一个应用实例。     

MPLS技术的研究

MPLS技术是一种在开放的通信网上利用定长标签引导数据高速传输和交换的网络技术。MPLS是NGN的RSVP资源预留协议、VOIP等几个关键技术之一。文中主要讲述mpls技术实现的基本原理,分析MPLS技术与IP技术在数据转发的差异。