一种多晶硅高温压力传感器

制作压力传感器时，在二氧化硅层上淀积多晶硅膜，既可利用优良的机械特性，又可保证压敏电阻与衬底间具有良好的绝缘性，由此可大大提高器件的温度特性。介绍了一种多晶硅压力传感器的原理和设计。实验结果表明，这类传感器具有灵敏度好，精度高等特点，电路工作范围为０－２５０℃，且具有良好的温度稳定性。     

Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm ×10 mm ×20 μm diaphragm, over which waveguides were placed at 50 μm intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

Simulation and fabrication of carbon nanotubes field emission pressure sensors

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.     

Improved convergence of a non-perturbative semi-classical pressure broadening model

It is shown that by including the second term of Magnus expansion, improved convergence can be achieved for the non-perturbative pressure broadening formalism proposed by Neilson and Gordon (J. Chem. Phys. 58 (1973) 4131). The present method was applied to the line broadening calculations of CO in a bath of Ar.     

热声驱动系统中的压力测量

介绍了自制的用于热声驱动脉管制冷装置的计算机压力波数据采集系统。该系统由硅压电压力传感器、数据采集卡、PC机和基于 Labview软件的图形化用户界面 GUI( Graphical User In-terface)组成。试验证明 ,它具有结构简单、高效精确、操作简便等特点 ,在捕捉被测系统内的动态压力变化方面具有优势 ,不但能很好地满足热声驱动器的压力测量要求 ,而且亦可移植到任何类似的测量气体压力的场合     

Bending-torsion vibration of a partially submerged cylinder with an arbitrary cross-section

An analytical method is presented to investigate the bending-torsion vibration characteristics of a cylinder with an arbitrary cross-section and partially submerged in water. The compressibility and the free surface waves of the water are considered simultaneously in the analysis. The exact solution of structure–water interaction is obtained mathematically. Firstly, the analytical expression of the velocity potential of the water is derived by using the method of separation of variables. The unknown coefficients in the velocity potential are determined by the longitudinal and circumferential Fourier expansions along the outer surface of the cylinder and are expressed in the form of integral equations including the unknown dynamic bending deflection and torsional angle of the cylinder. Secondly, the force and torque acting on the cylinder per unit length, provided by the water, are obtained by integrating the water dynamic pressure along the circumference of the cylinder. The general solution of bending-torsion vibration of the cylinder under the water dynamic pressure is derived analytically. The integral equations included in the velocity potential of the water can be solved exactly. Finally, the eigenfrequency equation of cylinder–water interaction is obtained by means of the boundary conditions of the cylinder. Some numerical examples for elliptical columns partially submerged in water are provided to show the application of the present method.     

K-Dependence and temperature dependence of N2-, H2-, and He-broadening coefficients for the J = 12-11 transition of acetonitrile CH3CN located near 220.7 GHz

Extensive experiments on the K = 3 component of the J = 12-11 rotational transition of acetonitrile CH₃C¹⁴N, located near 220.7 GHz, were performed at different temperatures in the range 235-350 K. They allow determining the N₂-, H₂-, and He-broadening coefficients, as well as their temperature dependences. More specific measurements on all the K-components of the involved transition perturbed by N₂ at 303 K allow to point out a clear decreasing of the broadening coefficient with increasing K. Narrowing effects are clearly observed, and experimental lines were analysed both with Voigt and speed dependent Voigt profiles; but no exhaustive lineshape study was carried out. All the experimental parameters are compared with results derived from a semiclassical calculation of collisional interactions, including electrostatic, induction, and dispersion energy contributions.     

集成pH－ISFET／压力传感器的研究

基于ＳＤＢ／ＳＯＩ材料和硅微机械加工技术，提出了一种含微参比电极和择优差分补偿单元的背面引线ＰＨ－ＩＳＦＥＴ／压力传感器的新结构。并且设计了高稳定的可调芯片自恒温系统，以减少硅材料对温度敏感的效应。这种结构既方便地实现敏感元和信号处理电路的完全隔离，又有效地改善了敏感特性和稳定性。初步实验结果证实了新结构设计是成功的。     

The effect of simultaneous temperature, pressure and stress on the experimental annealing of spontaneous fission tracks in apatite: a brief overview

Tracks made in minerals by the electronic stopping of uranium fission fragments provide a modern geological dating tool, and are believed also to yield specific information on the low-temperature thermal history of rocks. Experimental work showing that the damaged crystal lattice along a fission track recovers primarily as a function of temperature ignored the fact that the basic theory of atomic diffusion requires an exponential decrease in the intrinsic diffusion coefficient with increasing pressure. Here, fission track recovery was experimentally investigated in basic apatite under the simultaneous influences of temperature, pressure and stress. We show that track fading is a complex recovery mechanism responding to several environmental physical parameters simultaneously. In particular a strong decrease in the track recovery rate was observed as a function of increasing pressure. And a nearly temperature-independent recovery was observed in samples under stress.     

Differential FBG sensor for temperature-compensated high-pressure (or displacement) measurement

A differential fiber Bragg grating (FBG) sensor with a free active element bulk-modulus for high-pressure (or displacement) measurement is presented. Based on the differential measurement method and an isosceles triangle cantilever structure, problems of cross-sensitivity and chirped signal in FBG sensor are improved both theoretically and experimentally. Preliminary experiments indicate that temperature-compensated measurement results agree well with the theoretical analysis. Displacement measurement sensitivity is 1.75 pm/μm, and the estimated pressure measurement resolution can reach 0.27 MPa in case the wavelength shift measurement resolution is 0.01 nm.