Analysis of semiconducting materials by high-resolution radiofrequency glow discharge mass spectrometry

The analytical capabilities of a high-resolution mass spectrometer in combination with a 13.56 MHz glow discharge ion source for the analysis of semiconducting materials (silicon carbide and gallium arsenide) were studied. It was shown that single positively charged ions of sample material have about 10 eV higher average energy than the ions of the discharge and residual gas. Therefore effective energy separation of the ions of analyte from the ions of the discharge and residual gas was achieved by adjusting the ion transfer optics (breadth and position of energy slit), which improves the analytical capabilities of the developed method.Some analytical applications are presented to illustrate the performance of r.f. GDMS for the bulk analysis of semiconducting materials. The results of the trace element analysis of gallium arsenide and silicon carbide samples are compared with data of independent methods (LIMS, ICP-AES, SIMS).Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthdayOn leave from the Institute of Inorganic Chemistry, 630090 Novosibirsk, Russia     

射频磁控溅射法制备薄膜电池电极的计算机模拟初步

计算机模拟仿真射频磁控溅射实验制备薄膜及离于电池电极,研究了在特定实验条件下薄膜的生长过程,并分析了影响薄膜生长的部分因素。     

Fouling and protein adsorption effect of low-temperature plasma treatment of membrane surfaces

Adsorption of proteins and the effect of the chemical nature of membrane surfaces on protein adsorption were investigated using¹⁴C-tagged albumin and several microporous membranes (polyvinilydene fluoride, PVDF; nylon; polypropylene, PP; and polycarbonate, PC). The membrane surfaces were modified by exposing them to low-temperature plasma of several different monomers (n-butane, oxygen, nitrogen alone or as mixtures) in a radiofrequency plasma reactor. Transients in the permeability of albumin solutions through the membranes and changes in flux of distilled water through the membranes before and after adsorption of albumin were used to investigate the role of protein adsorption on membrane fouling. The results show that the extent of adsorption of albumin on hydrophobic membranes was considerably more than that on hydrophilic membranes. The hydrophilic membranes were susceptible to electrostatic interactions and less prone to fouling. A pore-blocking model was successfully used to correlate the loss of water flux through pores of defined geometry     

Oxidation of aromatic hydrocarbons with oxygen in a radiofrequency plasma

The reactions of three aromatic hydrocarbons, benzene, toluene, and styrene, with oxygen in a radiofrequency (r) plasma were investigated. Benzene was oxidized to yield phenol as a single volatile organic product. Similarly, toluene gave the ring oxidation products, cresols, as well as considerable amounts of methyl oxidation products, consisting mainly of benzaldehyde and benzyl alcohol. In contrast, the oxidation of styrene took place predominantly on the olefinic double bond to produce styrene oxide On basis of the products and effects of reaction variables, r power and flow rates of hydrocarbons and oxygen, on the reaction rate, the oxidation mechanism was discussed, particularly focusing on the intermediate species responsible for the formation of major products.     

Large-area microwave and radiofrequency plasma etching of polymers

We have investigated O₂/CF₄ plasma etching of five commercial polymers: polyimide, polyamide, polyethylene terephthalate, polycarbonate and cured epoxy resin. A new large-area microwave plasma apparatus has been used in this work, but the same apparatus can also be used as a capacitively coupled radiofrequency (13.56 MHz) discharge reactor. The effect of operating parameters such as pressure, etchant gas composition, excitation frequency and sample temperature upon etch kinetics has been examined. We have observed distinct maxima in the etch rate as functions of pressure and CF₄ concentration. Activation, energies evaluated from the Arrhenius plots fall in the range 0.04-0.2 eV, in agreement with data in the literature. Dry etch susceptibility of a given polymer correlates strongly with the degree of unsaturation in the polymer's structure     

Diffusion measurements with the aid of nutation spin echoes appearing after two inhomogeneous radiofrequency pulses in inhomogeneous magnetic fields

Nutation echoes are generated by radiofrequency (RF) pulses with an inhomogeneous amplitude, B(1) = B(1)(r), in inhomogeneous magnetic fields, B(0) = B(0)(r). The two gradients of strengths G(1) and G(0), respectively, must be aligned in parallel for a maximum echo signal. After two RF pulses, two echoes appear at times tau(a) = 2 tau(1) + tau(2) + (G(1)/G(0))tau(1) and tau(b) = 2 tau(1) + tau(2) + 2(G(1)/G(0))tau(1), where tau(1) is the RF pulse duration and tau(2) the interpulse interval. It is shown that these echoes can favorably be employed for the determination of self-diffusion coefficients even in the poor experimental situation one often faces in low-resolution or low-field NMR. The signal intensity is comparable to that of ordinary Hahn echoes. Diffusion coefficients and spin-lattice relaxation times can be evaluated from the same experimental data set if both nutation echoes are recorded. Test experiments are in good agreement with literature data. Applications of the technique to "inside out" NMR, well logging NMR, surface coil NMR, toroid cavity NMR, etc., are suggested.     

针对限制幅值磁共振脉冲的优化设计

在磁共振脉冲优化领域,优化脉冲普遍存在幅值过大的问题,这极大地限制了优化脉冲的使用范围。为了限制优化脉冲的幅值,扩大其应用范围,提出了一种基于L-BFGS-B数值算法的脉冲优化设计方法。首先基于Liouville-von Neuman方程,使用最优控制思想构建优化模型;然后使用L-BFGS-B算法,在限制幅值的条件下对优化模型进行数值迭代求解;最后以脉冲的激发效率以及激发轮廓的均匀性作为衡量优化脉冲优劣的标准对该方法进行仿真和实验验证。结果表明,采用该方法获得的优化脉冲在幅值被限制的前提下,仍能获得较传统磁共振脉冲更好的共振激发效果,进而增强信号的灵敏度,提高图像的质量。     

Multifunctional Sulfur-Hyperdoped Silicon Nanoparticles with Engineered Mid-Infrared Sulfur-Impurity and Free-Carrier Absorption

Si nanoparticles (NPs), which are innovative promising light-harvesting components of thin-film solar cells and key-enabling biocompatible theranostic elements of infrared-laser and radiofrequency hyperthermia-based therapies of cancer cells in tumors and metastases, are significantly advanced in their near/mid-infrared band-to-band and free-carrier absorption via donor sulfur-hyperdoping during high-throughput facile femtosecond-laser ablative production in liquid carbon disulfide. High-resolution transmission electron microscopy and Raman microscopy reveal their mixed nanocrystalline/amorphous structure, enabling the extraordinary sulfur content of a few atomic percents and very minor surface oxidation/carbonization characterized by energy-dispersive X-ray spectroscopy and X-ray photoelectron spectroscopy. A 200-nm thick layer of the nanoparticles exhibits near−mid-infrared absorbance, comparable to that of the initial 380-micron thick n-doped Si wafer (phosphor-dopant concentration ≈10¹⁵ cm⁻³), with the corresponding extinction coefficient for the hyperdoped NPs being 4–7 orders higher over the broadband spectral range of 1–25 micrometers. Such ultimate, but potentially tunable mid-IR structured, multi-band absorption of various sulfur-impurity clusters and smooth free-carrier absorption are break through advances in mid-infrared (mid-IR) laser and radiofrequency (RF) hyperthermia-based therapies, as envisioned in the RF-heating tests, and in fabrication of higher-efficiency thin-film and bulk photovoltaic devices with ultra-broad (UV−mid-IR) spectral response.     

Residual changes in the surface charge of TiO2 (anatase) suspensions as a result of exposure to a 44 MHz radiofrequency electric field

Potentiometric titrations of TiO₂ (anatase) suspensions in solutions of 10^–2, 10^–3, and 10^–4 M NaCl prior to treatment with a radiofrequency (RF) electric field gave values of pH_pzc and pH_iep of 5.75±0.1 and 5.85±0.1, respectively, within the range of literature values. Surface charge plots versus pH for untreated samples gave curves with a common intersection point, indicating that NaCl acts as an indifferent electrolyte. Identical suspensions of anatase were then exposed for 30 min to an RF electric field with a peak-to-peak, no-load amplitude of 34V and a frequency of 44 MHz. Portions of the treated suspension were titrated after different time periods following removal of the field (2, 15, 30, and 45 min). At 2 min, the pH_pzc had shifted to 6.50±0.1, and at 15, 30 and 45 min, the curves for the three NaCl concentrations were found to lack a common intersection point, an effect which became more pronounced with time. It is proposed that RF treatment results in the formation of a porous gel layer of hydrous titanium dioxide on the surface of the anatase particles that subsequently undergoes a slow ion-exchange reaction involving ions of the supporting electrolyte.     

Reaction Mechanisms in Both a CCl2F2/O2/Ar and a CCl2F2/H2/Ar RF Plasma Environment

Decomposition of dichlorodifluoromethane (CCl₂F₂ or CFC-12) in aradiofrequency (RF) plasma system is demonstrated. The CCl₂F₂decomposition fractions _{CCl 2 F 2} and mole fractionsof detected products in the effluent gas stream of CCl₂F₂/O₂/Ar andCCl₂F₂/H₂/Ar plasma, respectively, have been determined. The experimentalparameters including input power wattage, O₂/CCl₂F₂ or H₂/CCl₂F₂ ratio,operational pressure, and CCl₂F₂ feeding concentration wereinvestigated. The main carbonaceous product in the CCl₂F₂/O₂/Arplasma system was CO₂, while that in the CCl₂F₂/H₂/Ar plasma systemwas CH₄ and C₂H₂. Furthermore, the possible reaction pathways werebuilt-up and elucidated in this study. The results of the experimentsshowed that the highly electronegative chlorine and fluorine wouldeasily separate from the CCl₂F₂ molecule and combine with the addedreaction gas. This led to the reactions terminated with the CO₂,CH₄, and C₂H₂ formation, because of their high bonding strength. Theaddition of hydrogen would form a preferential pathway for the HCland HF formations, which were thermodynamically stable diatomicspecies that would limit the production of CCl₃F, CClF₃, CF₄, andCCl₄. In addition, the HCl and HF could be removed by neutral orscrubber method. Hence, a hydrogen-based RF plasma system provideda better alternative to decompose CCl₂F₂.