微纳米加工技术及其应用综述

材料与结构在微纳米尺度展现了许多不同于宏观尺度的新特征，纳米技术已经成为当前科学研究与工业开发的热门领域之一。微小型化依赖于微纳米尺度的功能结构与器件，实现功能结构微纳米化的基础是先进的微纳米加上技术，文章对微纳米加上技术做了一个综合的介绍，简要说明了微纳米加工技术与传统加工技术的区别，在微纳米加工技术的应用方面提出了一些合理选择加工技术的原则，并对当前微纳米加工技术面临的挑战和今后发展的趋势作了预测。     

In situ hot-stage transmission electron microscopy of Pb(Zr0.52Ti0.48)O3

The domain structure of Pb(Zr_0.52Ti_0.48)O₃ before and after hot-stage experiment has been studied. The influence of maximum temperature, heating and cooling rate on the domain configuration of Pb(Zr_{1? x} , Ti _x )O₃ with x = 0.40, 0.45, 0.48 and 0.55 was analysed. A reliable basis for further hot-stage experiments of Pb(Zr_1?x, Ti_x)O₃ has been established. The investigations revealed a temperature dependent appearance and disappearance of nano- and microdomains. The appearance of microdomains in the nano scale range during cooling, denoted as domain miniaturisation, and the time dependent recovering of the former domain structure, revealed that under specific experimental conditions the domain configuration is reversible.     

Nanostructured Gold Microelectrodes for Non‐enzymatic Glucose Sensor

A novel, highly stable, selective, and sensitive non‐enzymatic glucose sensor was developed by simple and effective modification procedure. The modification of gold microelectrodes by electrochemically deposited gold nanoparticles resulted in increase of surface area up to 37 %. The nanostructured surfaces of the gold microelectrodes obtained by different modifications were studied by confocal microscopy, atomic force microscopy, and scanning electron microscopy. The gold nanoclusters exhibit great electrocatalytic properties toward glucose with a wide linear range from 0.5 to 50 mM, with a limit of detection 218 μM, and sensitivity of 185.2 mA mM^?1cm^?2. Moreover, the modified microelectrodes display good reproducibility, stability, and selectivity in the presence of poisoning compounds. Due to the small dimensions of gold microelectrodes and a very small volume of the sample, the microelectrodes make a contribution to miniaturisation of the system.     

Miniaturisation of High-NA Objectives for Optical Recording

High-NA objectives for optical recording have received a lot of attention due to the investigation of the Blu-ray Disc system. More recently to enable optical storage in portable devices, small building height optical drives have been studied requiring miniaturised high-NA objectives. Previously reported miniaturised objectives consist of two elements and are, therefore, less suited for mass production. In this paper the design and manufacturing of a miniaturised single element high-NA objective is reported. Furthermore, with the aid of non-periodic phase structures the tolerances of the objectives can be further expanded.     

Inorganic Arsenic and Selenium Determination Using Miniaturised Isotachophoresis

A new method allowing the simultaneous determination of arsenic(V), selenium(IV) and selenium(VI) using miniaturised isotachophoresis has been developed. The method uses 0.02 M nitric acid buffered to pH 5.5 with histidine as the leading electrolyte. Using a miniaturised poly(methyl methacrylate) chip device with an integrated conductivity detector, separations of model samples and an industrial process stream sample were achieved. Limits of detection were calculated to be 0.85 mg L⁻¹ for arsenic(V), 0.95 mg L⁻¹ for selenium(IV) and 1.0 mg L⁻¹ for selenium(VI). A method for the analysis of arsenic(III), using a glycolic acid based leading electrolyte to eliminate carbonate interference is also presented.