Role of ion energy flux on the structural and morphological properties of silicon oxy-nitride composite films deposited by plasma focus device

ABSTRACT

Crystalline silicon oxy-nitride (SiON) composite films are deposited on Si substrate for multiple (5, 15, 25 and 50) focus shots (FS) by plasma focus device. The X-rays diffraction patterns reveal the development of various diffraction peaks related to Si, Si₃N₄, and SiO₂ phases which confirms the formation of SiON composite film. The intensity of Si₃N₄ (1 0 2) plane is linearly increased with the increase of FS. The Si₃N₄ (1 0 2) phase does not nucleate for 5 FS. Raman analysis confirms the formation of β–Si–N phase. Raman and Fourier transform infrared spectroscopy analysis reveals that the strength of chemical bonds like Si–N, Si–O formed during the deposition process of SiON composite films is associated with the bonds intensity which in turn depends on the number of FS. The field emission scanning electron microscopic analysis reveals that the surface morphology like size, shape and distribution of micro/nano-dimensional particles, film compactness and the formation of micro-rods, micro-teethes and micro-tubes of SiON composite films is entirely associated with the rise in substrate surface transient temperature which in turn depends on the increasing number of FS. The EDX spectrum confirms the presence of Si (22.5?±?4.7 at. %), N (13.4?±?4.5 at. %) and O (54.7?±?11.3 at. %) in the SiON composite film. The thickness of SiON composite film deposited for 50 FS is found to ～15.47?µm.     

微通道中液氮单相流动和换热实验研究

对直径为0.531,0.834,1.042和1.931 mm的圆形微通道内液氮的单相流动和传热进行了实验研究.在10,000～90,000的高雷诺数范围内,测量了流动摩擦系数、局部和平均对流换热系数.结果表明,流动摩擦系数随微通道壁面粗糙度的增加而变大.微通道中局部对流换热系数受到液氮导热系数变化的影响沿管程逐渐下降约12.5%.传统的Gnielinski换热关联式经过流动摩擦系数的修正后与实验换热系数符合较好.     

HPAM溶液在石英微圆管中的流动实验

针对HPAM溶液在油藏孔隙中的复杂渗流特性问题,在内径为10～350μm微圆管中进行了部分水解聚丙烯酰胺(HPAM)溶液的流动实验.实验结果表明:在本文实验条件下,HAPM溶液在管径尺度较小的微圆管内的流动规律明显偏离常规尺度下的非牛顿流体力学流动规律,其截面平均流速高于按照常规尺度流动推算出的结果,且管径越小,偏离程度越大,微尺度效应越强.