投影光刻机硅片调焦调平测量模型

成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要.     

双轴转台的八位置调平及失准角估算

重力梯度旋转平台调制实验时要求旋转平台台面的水平失准角在一定范围之内。使用两位置正交方法对双轴转台进行调平时,能保证正交两个方向上水平精度,但无法保证在多个方向上的水平精度。对此,提出了一种八位置调平方法,即将整周360°分为八个位置,两个相邻位置的夹角为45°,依次测量八个位置的水平失准角,取最大值和最小值之和的二分之一作为中值,每个位置失准角与中值求差,通过差值的符号并结合八位置图确定调高或调低相应的地脚。同时,给出了一种通过匀速旋转调制来估算台面最大水平失准角的方法。实验表明:在目前实验条件下,八位置调平方法能将转台台面最大失准角控制在3″以内,旋转调制估算的水平失准角为2.9″。     

Field of concentrations and conditions of template structure formation of a silica mesoporous molecular sieves of MCM-48 type

The region of composition and concentration of the reaction mixtures for template structure formation of silica mesomorphous molecular sieves of the MCM-48 type have been determined, the boundary concentrations of the reagents have been determined, and also the effects of synthesis conditions (in particular the ratio of the template and the skeleton-forming elements and the temperature factor) on the structure transformation in the CTAB-TEOS-NaOH-H₂O system. Reproducible methods have been developed for the synthesis of highly ordered MCM-48 with minimization of the amount of surfactant and without the use of additional organic substances. __________ Translated from Teoreticheskaya i éksperimental’naya Khimiya, Vol. 44, No. 3, pp. 186–190, May–June, 2008.     

A UNIFIED ISOSTATIC DATUM AND ITS APPLICATION IN SEA LEVEL CHANGE RESEARCH

The necessity of establishing a Unified Isostatic Datum (UID) for studying the sea levelchanges along the coast of China is discussed in this paper. A so-called Coastal Land Ver-tical Movement Isostatic Datum (CLVMID) is established based on precise releveling dataperformed from the 1950s to 1980s and some coniunction releveling data with tide stations.All the data consists of about 250,000 km releveling lines and covers the whole mainland ofChina. As examples, datum corrections for sea level changes derived from two tide stationsand recent crustal vertical movement in the Yangtse Delta area relative to the datum aregiven to explain the significance of the isostatic datum in the research of the sea levelchange trend.     

工程施工中的SRTP问题研究

在大型的建设工程项目中，经常要进行场地平整工作。场地平整过程中需要进行大量的施工材料的调运工作，这引出了一个最短路径调运问题（SRTP），目标是找到一个最短的车辆行走路线，使得整个施工过程的总运输距离最短。该问题属于NP-hard问题，本文采用模拟退火算法求解该问题，最后通过箅例计算，并同贪婪算法的求解结果进行比较，验证了模拟退火算法的高效性。     

Mixed-integer linear programming for resource leveling problems

We consider project scheduling problems subject to general temporal constraints, where the utilization of a set of renewable resources has to be smoothed over a prescribed planning horizon. In particular, we consider the classical resource leveling problem, where the variation in resource utilization during project execution is to be minimized, and the so-called “overload problem”, where costs are incurred if a given resource-utilization threshold is exceeded. For both problems, we present new mixed-integer linear model formulations and domain-reducing preprocessing techniques. In order to strengthen the models, lower and upper bounds for resource requirements at particular points in time, as well as effective cutting planes, are outlined. We use CPLEX 12.1 to solve medium-scale instances, as well as instances of the well-known test set devised by Kolisch et al. (1999). Instances with up to 50 activities and tight project deadlines are solved to optimality for the first time.     

SWELLING BEHAVIOR OF ACRYLAMIDE HYDROGEL IN DIFFERENT SOLVENTS AND pHs

Swelling property of acrylamide hydrogels, prepared from aqueous solutions of acrylamide monomer having concentrations in the range of 10-60 wt% by γ-ray irradiation method using a Co-60 gamma radiation source at doses ranging 1-30.0 kGy, has been investigated under various swelling media. These swelling media were basically solvents (solutions), produced by dissolving methanol, ethanol, glucose, sucrose, sodium chloride and sodium persulfate individually with distilled water, and solutions prepared with pHs = 3, 7 and 10. The investigation was performed in order to observe the effect of these solvents and pHs as well as the influence of monomer concentrations, radiation doses and times on swelling behavior of hydrogels. Swelling values were found higher for hydrogels prepared with lower monomer concentrations (ca.20 wt%) and radiation doses (ca. 5 kGy) and showed a leveling off tendency within 24 h. The glucose solvent and the buffer solution of pH = 10 revealed significant increase of swelling of hydrogels as compared to other solutions. Results are explained based on crosslinking density in hydrogel, polymer-solvent/polymer-polymer interactions in solutions,permeability of molecules in solutions and ionization capacity of hydrogel in pH.     

伸长法测定杨氏模量实验装置的改进

根据光杠杆的原理,借助于激光器、反射镜等器件,设计制作了一个高精度水准仪;用螺旋测微器测量水准仪平移的距离,从而得到钢丝长度的微小变化值.改进后的实验装置科学直观,准确度高,重复性好.     

供应链环境下跨组织的PCPSP问题研究

在供应链环境下研究跨组织的资源受限项目调度问题,从项目调度整体效用最大化角度,考虑工期、成本和资源均衡对项目调度的影响。构建并剖析供应链环境下跨组织的资源受限项目调度模型,利用正态云模型中云滴的随机性与稳定性的特征改进遗传算法中交叉算子与变异算子的设置方式,并对模型进行数据模拟和算例分析。结果表明,以工期-成本-资源均衡为优化目标,不仅可实现供应链环境下跨组织的资源受限项目调度的效用最大化,且可缩短项目工期、降低成本并提高资源的利用率。     

超声波传感器在摊铺机自动调平控制系统中的应用

针对摊铺机自动调平控制系统对测距精度的较高要求,设计了一种具有较高精度的基于超声波传感器的测距系统。实验结果表明,在常用的测距范围内,静态测距精度可达1mm。介绍了测距系统的原理以及系统的软、硬件实现方法。