Preparation and Properties of Anti-Reflection/Anti-Static Thin Films for Cathode Ray Tubes Prepared by Sol-Gel Method Using Photoirradiation

A new technique for preparing anti-reflection/anti-static thin films for CRTs at low temperature has been developed. Double-layered films of SiO₂/SnO₂ were formed on a CRT panel surface by the sol-gel method using photoirradiation. The new method makes it possible to reduce heat treatment temperature (°C) by almost 50% and treatment time to approximately 33% of the conventional levels.     

色分离光栅镀膜减反技术研究

 根据惯性约束聚变系统技术要求，提出一种镀膜减反方案，以解决现有光栅由于元件表面反射影响衍射效率的问题。对色分离光栅镀膜减反技术进行了详细的分析，根据标量理论给出了镀膜光栅的各项技术要求，优化了光栅结构参数。模拟计算结果发现，光栅表面反射几乎完全消除，表明可以通过色分离光栅镀膜减反提高衍射效率的目的。该镀膜光栅刻槽深度的优化值为2.84μm，膜厚为等效1/4波长，即71.2nm。     

Nano-Particles by Wet Chemical Processing in Commercial Applications

Nano-sized materials produced by wet chemical processing have a wide range of industrial applications. For example, a solution of monodisperse SiO₂-particles for single-layer anti-reflection coating on glass was developed. Although being porous, the anti-reflection coating shows excellent mechanical stability which is sufficient for commercial applications. The coating sol is used to produce cover glass with high transmission for solar energy systems, e.g. photovoltaic modules.Nano-sized materials made by sol–gel processes are not limited to niche applications. Inorganic metal oxide coatings on thin mica platelets are the basis for pearl lustre pigments. The inorganic layers, consisting of titanium dioxide or iron oxides, are obtained by a wet chemical procedure. The well-defined layer thickness, varying from 50 to 300 nm, determines the optical properties of the pearlescent pigment. By using synthetic SiO₂ platelets instead of natural mica, impressive angle-dependant colour effects can be achieved. Synthetic SiO₂ platelets are also produced by a sol–gel coating technique.Special spherical silica particles made by a wet chemical processing are used in cosmetic applications. The size distribution determines the skin feeling of the formulation. In addition, specific colour or anti-wrinkle effects can be achieved.     

Anti-Reflective Coatings of Flowerlike Alumina on Various Glass Substrates by the Sol–Gel Process with the Hot Water Treatment

Anti-reflective (AR) properties of flowerlike alumina thin films with a small roughness of less than 100 nm have been studied on substrates such as soda-lime silica glass, non-alkali glass, and quartz glass. The highest AR effects were obtained on quartz glass substrate, which has the lowest refractive index of the three substrates. The reflectance of quartz glass substrates coated with flowerlike Al₂O₃ was less than 0.5% in the wavelength region from 300 to 720 nm.     

TiO2/Al2O3薄膜的原子层沉积和光学性能分析

采用原子层沉积技术在熔石英和BK7玻璃基片上镀制了TiO2/Al2O3薄膜,沉积温度分别为110℃和280℃。利用X射线粉末衍射仪对膜层微观结构进行了分析研究,并在激光损伤平台上进行了抗激光损伤阈值测量。采用Nomarski微分干涉差显微镜和原子力显微镜对激光损伤后的形貌进行了观察分析。结果表明,采用原子层沉积技术镀制的TiO2/Al2O3增透膜的厚度均匀性较好,Φ50 mm样品的膜层厚度均匀性优于99%;光谱增透效果显著,在1 064 nm处的透过率〉99.8%;在熔石英和BK7基片上,TiO2/Al2O3薄膜在110℃时的激光损伤阈值分别为（6.73±0.47）J/cm2和（6.5±0.46）J/cm2,明显高于在280℃时的损伤阈值。     

High-contrast top-emitting organic light-emitting devices

In this paper we report on a high-contrast top-emitting organic light-emitting device utilizing a moderate-reflection contrast-enhancement stack and a high refractive index anti-reflection layer.The contrast-enhancement stack consists of a thin metal anode layer,a dielectric bilayer,and a thick metal underlayer.The resulting device,with the optimized contrast-enhancement stack thicknesses of Ni(30 nm)/MgF 2(62 nm)/ZnS(16 nm)/Ni(20 nm) and the 25-nm-thick ZnS anti-reflection layer,achieves a luminous reflectance of 4.01% in the visible region and a maximum current efficiency of 0.99 cd/A(at 62.3 mA/cm 2) together with a very stable chromaticity.The contrast ratio reaches 561:1 at an on-state brightness of 1000 cd/m 2 under an ambient illumination of 140 lx.In addition,the anti-reflection layer can also enhance the transmissivity of the cathode and improve light out-coupling by the effective restraint of microcavity effects.     

激光／红外双波段减反射膜研究

在硫化锌、硒化锌两种基底上开展了激光／中波红外、激光／长波红外双波段减反射膜技术研究。通过采用离子辅助沉积以及镀保护膜层等方法,对膜系结构和镀制工艺进行了优化。研制的激光／红外双波段减反射膜不仅具有良好的光学性能,而且具有较强的抗恶劣环境能力,可以满足实际使用要求。     

波长1 31 5nm的石英窗口增透膜

用Ta     

全息光刻中的驻波效应研究

对光刻胶内光强分布进行了计算与模拟, 结果表明, 来自基底的反射光与入射光干涉, 光强在垂直基底的方向上呈现强弱周期性变化, 即驻波效应. 进一步的分析与实验结果表明, 随着基底反射率的增加, 驻波效应变得严重, 进而影响光栅掩模的槽形、占宽比并限制线条高度. 为减弱驻波效应的影响, 尝试了使用减反射膜降低基底反射光强度, 实验结果表明, 在基底与光刻胶之间增加一层减反射膜吸收来自基底的反射光强度, 减弱驻波效应的效果显著. 关键词： 全息光刻 驻波 减反射膜     

Y2O3:Bi,Yb减反转光薄膜的制备及其性能研究

采用脉冲激光沉积(PLD)方法在湿法腐蚀后的Si(100)衬底上制备了Y₂O₃:Bi,Yb减反转光薄膜。所制备的薄膜在300~800 nm波长范围内的平均反射率最低至5.28%,同时在晶体硅太阳能电池最佳响应范围内的980 nm附近表现出了良好的下转光特性。与非减反下转光薄膜相比较,具有减反结构的Y₂O₃:Bi,Yb下转换薄膜的转光强度有了明显的提升。随着衬底腐蚀时间在一定范围内的延长,Bi³⁺和Yb³⁺的发射峰强度线性增大。该减反转光薄膜为太阳能电池效率提高提供了一种简单可行的方法。